Brian Knapik - Glen Allen VA, US David Lawson - Glen Allen VA, US Gregory Proctor - Chester VA, US
International Classification:
B65G049/07
US Classification:
414/416030
Abstract:
A system and method for improved throughput of semiconductor wafer processing. In one aspect, a wafer carrier is provided having a flat zone capable of holding an additional lot of wafers for processing. In addition, a multiple fork wafer transfer mechanism is provided having a plurality of wafer forks for loading and unloading wafers in the wafer carrier at a reduced fork pitch.
Dr. Proctor graduated from the Rosalind Franklin University/ Chicago Medical School in 2000. He works in Longmont, CO and 2 other locations and specializes in Nephrology. Dr. Proctor is affiliated with Medical Center Of Aurora North, Parker Adventist Hospital, Sentara Norfolk General Hospital, St Joseph Hospital and The Medical Center Of Aurora.
UCLA Medical GroupUCLA Medical Specialty Practice Nephrology 200 Ucla Medical Plz, Los Angeles, CA 90095 3102067662 (phone), 3102063607 (fax)
Languages:
English Spanish
Description:
Dr. Proctor works in Los Angeles, CA and specializes in Nephrology and Internal Medicine. Dr. Proctor is affiliated with Ronald Reagan UCLA Medical Center.
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