David May - Ashville OH, US Ron Snelly - Obetz OH, US Gretchen Wilk - Grove City OH, US
International Classification:
C23C014/32
US Classification:
204/298120
Abstract:
Metal sputtering apparatus is provided with a cathodic backing plate element having at least one sputtering metal cavity that contains a sputtering metal and that has a peripheral undercut that enhances the retention of the contained sputtering metal in the sputtering metal cavity.
Youtube
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