Lam Research
Senior Staff Mechanical Engineer
Philips May 2005 - Sep 2007
Senior Mechanical Engineer
Asyst Technologies Jun 1999 - May 2005
Senior Systems Design Engineer
Education:
California Polytechnic State University - San Luis Obispo
Bachelors, Mechanical Engineering
Skills:
Solidworks Engineering Design For Manufacturing Mechanical Engineering Semiconductors Finite Element Analysis R&D Cad Ptc Creo Sheet Metal Six Sigma Cross Functional Team Leadership Pro Engineer Machining Engineering Management
- Fremont CA, US Candi Kristoffersen - San Jose CA, US Gustavo G. Francken - Pleasanton CA, US James Van Gogh - Sunnyvale CA, US Benjamin W. Mooring - Cedar Park TX, US
International Classification:
H01L 21/67
Abstract:
A loading station for a substrate processing system includes first and second vertically-stacked loading stations. The first loading station includes a first airlock volume and first and second valves arranged at respective ends of the first loading station. The first and second valves are configured to selectively provide access to the first airlock volume and include first and second actuators, respectively, configured to open and close the first and second valves, and the first and second actuators extend downward from the first loading station. The second loading station includes a second airlock volume and third and fourth valves arranged at respective ends of the second loading station. The third and fourth valves are configured to selectively provide access to the second airlock volume and include third and fourth actuators, respectively, configured to open and close the third and fourth valves.