Halil Tugal - Windham NH Bruce R. Bent - Scituate MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
B01D 702
US Classification:
62 555
Abstract:
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations of the bellows and is bonded to the bellows. A dynamic absorber operates to attenuate vibrations of a partucular frequency from being transmitted into the refrigerator from a drive unit of the cryopump.
Flex-Line Vibration Isolator And Cryopump With Vibration Isolation
Halil Tugal - Windham NH Peter W. Gaudet - Chelmsford MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
F17C 702
US Classification:
62 501
Abstract:
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes a bellows having o-rings made of vibration damping material secured between the corragations of the bellows. A soft damping material maintains a low spring constant and also dampens all frequencies transmitted into the isolator.
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations of the bellows and is bonded to the bellows.
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