Hung D Hoang

US Patent:

20210405665, Dec 30, 2021

Filed:

Jun 23, 2021

Appl. No.:

17/356287

Inventors:

- Santa Clara CA, US
Hung Xuan Hoang - Milpitas CA, US
Dmitry Sklyar - San Jose CA, US
Farooq Aleem - Cupertino CA, US
Jagan Rangarajan - Fremont CA, US
William Wadsworth - Santa Clara CA, US
Brett Hoogensen - Los Gatos CA, US

International Classification:

G05D 7/06
G05B 19/042

Abstract:

In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.