Jacqueline Fischer

US Patent:

48186619, Apr 4, 1989

Filed:

Jul 21, 1987

Appl. No.:

7/079962

Inventors:

Charles J. Taylor - Catonsville MD
Julius Grossman - Randallstown MD
Jacqueline Fischer - Silver Spring MD
Howard A. Smith - Chevy Chase MD
Martin C. Peckerar - Silver Spring MD
Milton L. Rebbert - Elkridge MD

Assignee:

The United States of America as represented by the Secretary of the Navy - Washington DC

International Classification:

G03C 500

US Classification:

430320

Abstract:

A method of fabricating a free-standing wire mesh grid pattern having a sth, flat surface is disclosed. A thermal oxide is selectively applied to front and back sides of a silicon substrate. A central portion of the oxide on the back side is removed. A resist layer is applied onto the oxide on the front side of the substrate. A resist mesh pattern with a border encompassing that resist mesh pattern is lithographically developed on the resist layer. Chrome and gold layers are sequentially deposited onto the border and into the resist mesh pattern to create a wire mesh pattern within the resist mesh pattern. The resist layer, including the developed resist mesh pattern, is removed to expose the wire mesh pattern from the front side of the substrate. A nickel layer is deposited over the gold layer to develop a wider wire mesh pattern. A second gold layer is then deposited over the nickel layer to form a wire mesh grid pattern composed of chrome, gold, nickel and gold layers.