James R Burt

US Patent:

58740147, Feb 23, 1999

Filed:

Jun 7, 1995

Appl. No.:

8/483982

Inventors:

Anthony E. Robson - Alexandria VA
Ronald A. Rudder - Wake Forest NC
Robert C. Hendry - Hillsborough NC
Moses M. David - Woodbury MN
James V. Burt - Woodbury MN

Assignee:

Berkeley Scholars, Inc. - Springfield VA
Research Triangle Institute - Research Triangle Park NC
Minnesota Mining and Manufacturing Company - Saint Paul MN

International Classification:

H05H 100

US Classification:

216 68

Abstract:

A method and apparatus for treating a work surface, wherein there is provided a chamber having a longitudinal axis and longitudinally extending electrically conductive sidewalls, at least one sidewall having at least one longitudinally extending gap that interrupts a current path through the sidewalls transverse to the longitudinal axis, and wherein the chamber is sealed to allow pressure inside the chamber to be controlled. Also provided is an axially-extending array of current-carrying conductors which at least partially encircle the chamber, are transverse to the longitudinal axis, and establish a magnetic field parallel to the longitudinal axis of the chamber, and a power supply connected to the conductor array and adapted to provide high-frequency current in the conductors to magnetically induce ionization of the gaseous material in the chamber and form a plasma sheath that surrounds and extends along the longitudinal axis and conforms to the sidewalls of the chamber, and wherein the work surface is exposed to the plasma sheath and extends in the direction of the longitudinal axis.

US Patent:

61055182, Aug 22, 2000

Filed:

Jun 30, 1997

Appl. No.:

8/885720

Inventors:

Anthony E. Robson - Alexandria VA
Ronald A. Rudder - Wake Forest NC
Robert C. Hendry - Hillsborough NC
Moses M. David - Woodbury MN
James V. Burt - Woodbury MN

Assignee:

Research Triangle Institute - Research Triangle Park NC

International Classification:

H05H 100

US Classification:

110346

Abstract:

A method and apparatus for treating a work surface, wherein there is provided a chamber having a longitudinal axis and longitudinally extending electrically conductive sidewalls, at least one sidewall having at least one longitudinally extending gap that interrupts a current path through the sidewalls transverse to the longitudinal axis, and wherein the chamber is sealed to allow pressure inside the chamber to be controlled. Also provided is an axially-extending array of current-carrying conductors which at least partially encircle the chamber, are transverse to the longitudinal axis, and establish a magnetic field parallel to the longitudinal axis of the chamber, and a power supply connected to the conductor array and adapted to provide high-frequency current in the conductors to magnetically induce ionization of the gaseous material in the chamber and form a plasma sheath that surrounds and extends along the longitudinal axis and conforms to the sidewalls of the chamber, and wherein the work surface is exposed to the plasma sheath and extends in the direction of the longitudinal axis.