James Donald Carmichael

US Patent:

6963595, Nov 8, 2005

Filed:

Jan 31, 2003

Appl. No.:

10/356168

Inventors:

John A. Rule - Hingham MS, US
Richard C. Morton - San Diego CA, US
Vladimir V. Fleurov - Escondido CA, US
Fedor Trintchouk - San Diego CA, US
Toshihiko Ishihara - San Diego CA, US
Alexander I. Ershov - San Diego CA, US
James A. Carmichael - Valley Center CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S003/22
H01S003/223

US Classification:

372 55, 372 56, 372 57, 372 58, 372 59, 372 60, 372 61

Abstract:

An automatic Flaser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the Fconsumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine Finjections needed to maintain laser beam quality within a delivery range. Preferred embodiments include Fcontrols for a two-chamber MOPA laser system.

US Patent:

7339973, Mar 4, 2008

Filed:

Sep 26, 2003

Appl. No.:

10/672182

Inventors:

Richard G. Morton - San Diego CA, US
Bryan Moosman - San Marcos CA, US
Timothy S. Dyer - Oceanside CA, US
James A. Carmichael - Valley Center CA, US
Jiping Zhang - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 3/097
H01S 3/22

US Classification:

372 87, 372 55, 372 57

Abstract:

Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.

US Patent:

7522650, Apr 21, 2009

Filed:

Mar 31, 2004

Appl. No.:

10/815387

Inventors:

William N. Partlo - Poway CA, US
Yoshiho Amada - San Diego CA, US
James A. Carmichael - Valley Center CA, US
Timothy S. Dyer - Oceanside CA, US
Walter D. Gillespie - Poway CA, US
Bryan G. Moosman - San Marcos CA, US
Richard G. Morton - San Diego CA, US
Curtis L. Rettig - Vista CA, US
Brian D. Strate - San Diego CA, US
Thomas D. Steiger - San Diego CA, US
Fedor Trintchouk - San Diego CA, US
Richard C. Ujazdowski - Poway CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 3/22

US Classification:

372 59, 372 55, 372 58

Abstract:

A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e. g. , a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other.

US Patent:

7706424, Apr 27, 2010

Filed:

Sep 29, 2005

Appl. No.:

11/241850

Inventors:

Yoshiho Amada - San Diego CA, US
James A. Carmichael - Valley Center CA, US
Richard G. Morton - San Diego CA, US
Richard M. Ness - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 3/22
H02G 3/04

US Classification:

372 55, 174 681

Abstract:

A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.

US Patent:

20130146570, Jun 13, 2013

Filed:

Dec 7, 2012

Appl. No.:

13/708288

Inventors:

Billy L. Johnson - Ramona CA, US
Erik H. Lundgren - San Diego CA, US
Timothy C. Bertch - San Diego CA, US
Charles P. Moeller - Del Mar CA, US
James A. Carmichael - Valley Center CA, US

Assignee:

GENERAL ATOMICS - San Diego CA

International Classification:

B23K 26/18
B23K 26/38

US Classification:

21912171, 2191217

Abstract:

The present embodiments providing methods, systems and apparatuses of protecting a surface during laser machining. In some embodiments, a method of protecting a surface during laser machining comprises: directing a fluid into a cavity of an object being laser machined, where the fluid does not have laser absorption properties; and directing a plurality of laser pulses at a wall of the object being laser machined, where the laser pulses are configured to form a hole through the wall such that at least one laser pulse passes through the hole and enters the cavity while the fluid is directed into the cavity such that the laser pulse is incident on the fluid and a surface together in order to inhibit backwall damage.