James Harold Crouch

US Patent:

20100258750, Oct 14, 2010

Filed:

Mar 16, 2010

Appl. No.:

12/725178

Inventors:

William N. Partlo - Poway CA, US
Igor V. Fomenkov - San Diego CA, US
Alexander I. Ershov - Escondido CA, US
Chris C. Chrobak - San Diego CA, US
James H. Crouch - San Diego CA, US

International Classification:

G21K 5/02
G21K 5/10

US Classification:

250504 R

Abstract:

An extreme ultraviolet light system includes a drive laser system, an extreme ultraviolet light chamber including an extreme ultraviolet light collector and a target material dispenser including a target material outlet capable of outputting a plurality of portions of target material along a target material path, wherein the target material outlet is adjustable. The extreme ultraviolet light system further includes a drive laser steering device, a detection system including at least one detector directed to detect a reflection of the drive laser reflected from the first one of the plurality of portions of target material and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of a first one of the plurality of portions of target material from a first light reflected from the first target material and logic for adjusting the target material dispenser outlet to output a subsequent one of the plurality of portions of target material to a waist of the focused drive laser. A method for generating an extreme ultraviolet light is also disclosed. A system and a method for optimizing an extreme ultraviolet light output is also disclosed.

US Patent:

20140191132, Jul 10, 2014

Filed:

Jan 10, 2013

Appl. No.:

13/738918

Inventors:

- San Diego CA, US
James Crouch - San Diego CA, US
Matthew R. Graham - San Diego CA, US
Steven Chang - San Diego CA, US
Paul Frihauf - La Jolla CA, US
Andrew Liu - San Diego CA, US
Wayne Dunstan - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

G21K 5/00

US Classification:

250372

Abstract:

Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.

US Patent:

20140103229, Apr 17, 2014

Filed:

Dec 17, 2013

Appl. No.:

14/109873

Inventors:

- San Diego CA, US
William N. Partlo - Poway CA, US
Igor V Fomenkov - San Diego CA, US
Alexander I. Ershov - Escondido CA, US
James H. Crouch - San Diego CA, US

Assignee:

Cymer, LLC - San Diego CA

International Classification:

G21K 5/00

US Classification:

250504 R

Abstract:

An extreme ultraviolet light system and method includes a drive laser, a chamber including an extreme ultraviolet light collector and a target material dispenser including an adjustable target material outlet capable of outputting multiple portions of target material along a target material path. Also included: a drive laser steering device, a detection system including at least one detector and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of the first portion of target material from the first light reflected from the first portion of target material and logic for adjusting the target material dispenser outlet to output a subsequent portion of target material to a waist of the focused drive laser. A system and a method for optimizing an extreme ultraviolet light output is also disclosed.