James J Garcia

US Patent:

6593241, Jul 15, 2003

Filed:

May 11, 1998

Appl. No.:

09/075854

Inventors:

Thomas Abraham - Scotts Valley CA
James Allan Bondur - San Jose CA
James Paul Garcia - Santa Clara CA

Assignee:

Applied Materials Inc. - Santa Clara CA

International Classification:

H01L 21311

US Classification:

438697

Abstract:

A method for planarizing a layer of material on a semiconductor device is disclosed, which planarizes a layer on a semiconductor device using a high density plasma system, and uses a sacrificial layer having a desirable etch to deposition rate. Additionally, the method for planarizing a layer can be easily incorporated into the semiconductor fabrication process, and is capable of achieving both local and global planarization.

US Patent:

6851436, Feb 8, 2005

Filed:

Jun 28, 2002

Appl. No.:

10/186908

Inventors:

Michael Ravkin - Sunnyvale CA, US
John deLarios - Palo Alto CA, US
Afshin Nickhou - Campbell CA, US
Katrina Mikhaylichenko - San Jose CA, US
James P. Garcia - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B003/00

US Classification:

134109, 134184, 134186, 134902, 15 211, 15 882, 15 883

Abstract:

A system and method for re-circulating processing fluids in a substrate processing system is provided. A fluid re-circulation system for a brush box processing tool includes a supply tank into which processing chemicals, DI water, or other processing fluids are introduced into the system from an external source. Processing chemicals are provided to the brush box and dispensed to process a substrate. Dispensed fluids drain from the brush box into a diverter through which fluids either flow to waste, or into a collection tank. Fluids from the collection tank flow into the supply tank to re-circulate for wafer processing. The re-circulation system includes filters for maintaining chemical purity, and chemical concentration is monitored and adjusted as necessary.

US Patent:

6988327, Jan 24, 2006

Filed:

Mar 31, 2003

Appl. No.:

10/404692

Inventors:

James P. Garcia - Santa Clara CA, US
John M. de Larios - Palo Alto CA, US
Michael Ravkin - Sunnyvale CA, US
Fred C. Redeker - Fremont CA, US
Carl Woods - Aptos CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 5/04

US Classification:

34407, 34 58, 34 92, 134 31, 216 84

Abstract:

A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

US Patent:

7000622, Feb 21, 2006

Filed:

Jun 24, 2003

Appl. No.:

10/603427

Inventors:

Carl A. Woods - Aptos CA, US
James P. Garcia - Santa Clara CA, US
John M. de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B 3/00

US Classification:

134 941, 134153, 134902

Abstract:

A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.

US Patent:

7003899, Feb 28, 2006

Filed:

Sep 30, 2004

Appl. No.:

10/957092

Inventors:

James P. Garcia - Santa Clara CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 21/00

US Classification:

34566, 34568, 34570, 34 79, 134 952

Abstract:

A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.

US Patent:

7069937, Jul 4, 2006

Filed:

Mar 31, 2003

Appl. No.:

10/404270

Inventors:

James P. Garcia - Santa Clara CA, US
Mike Ravkin - Sunnyvale CA, US
Carl Woods - Aptos CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B 3/00

US Classification:

134199, 134902, 134 941, 134 991, 1341032, 1341033, 134198

Abstract:

A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.

US Patent:

7127831, Oct 31, 2006

Filed:

Dec 22, 2005

Appl. No.:

11/318019

Inventors:

James P. Garcia - Santa Clara CA, US
John M. de Larios - Palo Alto CA, US
Michael Ravkin - Sunnyvale CA, US
Fred C. Redeker - Fremont CA, US
Carl Woods - Aptos CA, US

Assignee:

LAM Research Corporation - Fremont CA

International Classification:

F26B 5/04

US Classification:

34407, 134 31, 216 84

Abstract:

A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

US Patent:

7143527, Dec 5, 2006

Filed:

Nov 14, 2005

Appl. No.:

11/273853

Inventors:

James P. Garcia - Santa Clara CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 21/10

US Classification:

34380, 34397, 34 78, 134902

Abstract:

A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.