James A Garcia

US Patent:

6851436, Feb 8, 2005

Filed:

Jun 28, 2002

Appl. No.:

10/186908

Inventors:

Michael Ravkin - Sunnyvale CA, US
John deLarios - Palo Alto CA, US
Afshin Nickhou - Campbell CA, US
Katrina Mikhaylichenko - San Jose CA, US
James P. Garcia - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B003/00

US Classification:

134109, 134184, 134186, 134902, 15 211, 15 882, 15 883

Abstract:

A system and method for re-circulating processing fluids in a substrate processing system is provided. A fluid re-circulation system for a brush box processing tool includes a supply tank into which processing chemicals, DI water, or other processing fluids are introduced into the system from an external source. Processing chemicals are provided to the brush box and dispensed to process a substrate. Dispensed fluids drain from the brush box into a diverter through which fluids either flow to waste, or into a collection tank. Fluids from the collection tank flow into the supply tank to re-circulate for wafer processing. The re-circulation system includes filters for maintaining chemical purity, and chemical concentration is monitored and adjusted as necessary.

US Patent:

6988327, Jan 24, 2006

Filed:

Mar 31, 2003

Appl. No.:

10/404692

Inventors:

James P. Garcia - Santa Clara CA, US
John M. de Larios - Palo Alto CA, US
Michael Ravkin - Sunnyvale CA, US
Fred C. Redeker - Fremont CA, US
Carl Woods - Aptos CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 5/04

US Classification:

34407, 34 58, 34 92, 134 31, 216 84

Abstract:

A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

US Patent:

7003899, Feb 28, 2006

Filed:

Sep 30, 2004

Appl. No.:

10/957092

Inventors:

James P. Garcia - Santa Clara CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 21/00

US Classification:

34566, 34568, 34570, 34 79, 134 952

Abstract:

A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.

US Patent:

7069937, Jul 4, 2006

Filed:

Mar 31, 2003

Appl. No.:

10/404270

Inventors:

James P. Garcia - Santa Clara CA, US
Mike Ravkin - Sunnyvale CA, US
Carl Woods - Aptos CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B 3/00

US Classification:

134199, 134902, 134 941, 134 991, 1341032, 1341033, 134198

Abstract:

A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.

US Patent:

7127831, Oct 31, 2006

Filed:

Dec 22, 2005

Appl. No.:

11/318019

Inventors:

James P. Garcia - Santa Clara CA, US
John M. de Larios - Palo Alto CA, US
Michael Ravkin - Sunnyvale CA, US
Fred C. Redeker - Fremont CA, US
Carl Woods - Aptos CA, US

Assignee:

LAM Research Corporation - Fremont CA

International Classification:

F26B 5/04

US Classification:

34407, 134 31, 216 84

Abstract:

A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

US Patent:

7143527, Dec 5, 2006

Filed:

Nov 14, 2005

Appl. No.:

11/273853

Inventors:

James P. Garcia - Santa Clara CA, US
Fred C. Redeker - Fremont CA, US
John de Larios - Palo Alto CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 21/10

US Classification:

34380, 34397, 34 78, 134902

Abstract:

A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.

US Patent:

7234477, Jun 26, 2007

Filed:

Sep 30, 2002

Appl. No.:

10/261839

Inventors:

John M. de Larios - Palo Alto CA, US
Mike Ravkin - Sunnyvale CA, US
Carl Woods - Aptos CA, US
Fritz Redeker - Fremont CA, US
James P. Garcia - Santa Clara CA, US
Afshin Nickhou - Campbell CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B 3/00
F26B 5/04

US Classification:

134 952, 134 991, 134902, 34407

Abstract:

One of many embodiments of a substrate preparation system is provided which includes a head having a head surface where the head surface is proximate to a surface of the substrate. The system also includes a first conduit for delivering a first fluid to the surface of the substrate through the head, and a second conduit for delivering a second fluid to the surface of the substrate through the head, where the second fluid is different than the first fluid. The system also includes a third conduit for removing each of the first fluid and the second fluid from the surface of the substrate where the first conduit, the second conduit and the third conduit act substantially simultaneously.

US Patent:

7387689, Jun 17, 2008

Filed:

May 18, 2007

Appl. No.:

11/750960

Inventors:

John M. de Larios - Palo Alto CA, US
Mike Ravkin - Sunnyvale CA, US
Carl Woods - Aptos CA, US
Fritz Redeker - Fremont CA, US
James P. Garcia - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B08B 3/00
F26B 5/04

US Classification:

134 21, 134 30, 134 36, 134902, 34407, 34 92

Abstract:

Methods for processing substrate through a head that is configured to be placed in close non-contact proximity to a surface of a substrate are provided. One method includes applying a first fluid onto the surface of the substrate from conduits in the head when the head is in close proximity to the surface of the substrate and removing the first fluid from the surface of the substrate. The removing is processed just as first fluid is applied to the surface of the substrate, and the removing ensures that the applied first fluid is contained between a surface of the head and the surface of the substrate and the first fluid being applied and removed defines a controlled meniscus. The method further includes moving the controlled meniscus over different regions of the surface of the substrate when movement of the head or the substrate is dictated. The moving of the controlled meniscus enables processing of part or all of the surface of the substrate using the first fluid.