James R Hills

US Patent:

20050042136, Feb 24, 2005

Filed:

Aug 18, 2003

Appl. No.:

10/642848

Inventors:

Paul Marganski - Seymour CT, US
Joseph Sweeney - New Milford CT, US
Glenn Tom - New Milford CT, US
Jose Arno - Brookfield CT, US
Thomas Baum - New Fairfield CT, US
Jeffrey Roeder - Brookfield CT, US
James Hills - Tigard OR, US

International Classification:

G01N021/00

US Classification:

422058000, 436169000

Abstract:

A windowed chamber, e.g., a semiconductor manufacturing process chamber such as a scrubber, deposition chamber, thermal reactor, or the like, including a port with a radiation-transmissive window therein. Interiorly disposed within the chamber is (i) a disposable film on an interior surface of the window and/or (ii) a colorimetric medium disposed in viewable relationship to the window, so that a colorimetric change is perceivable through the window, e.g., visually or by optical sensing device, when the colorimetric medium is exposed to target gas species. Also disclosed is a gas detection article including a polymeric material that is colorimetrically responsive to the presence of at least one target gas species, in exposure thereto.