John F. Kaeding - Mountain View CA, US Dong-Seon Lee - Anyang-si, KR Michael Iza - Santa Barbara CA, US Troy J. Baker - Santa Barbara CA, US Hitoshi Sato - Santa Barbara CA, US Benjamin A. Haskell - Santa Barbara CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA Japan Science and Technology Agency - Saitama Prefecture
A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow of nitrogen and/or hydrogen and/or ammonia, depositing an InGaN nucleation layer on the heated substrate, depositing a semipolar nitride semiconductor thin film on the InGaN nucleation layer, and cooling the substrate under a nitrogen overpressure.
John F. Kaeding - Mountain View CA, US Dong-Seon Lee - Anyang-Si, KR Michael Iza - Santa Barbara CA, US Troy J. Baker - Santa Barbara CA, US Hitoshi Sato - Kanagawa, JP Benjamin A. Haskell - Santa Barbara CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA Japan Science and Technology Agency - Saitama Prefecture
A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow of nitrogen and/or hydrogen and/or ammonia, depositing an InGaN nucleation layer on the heated substrate, depositing a semipolar nitride semiconductor thin film on the InGaN nucleation layer, and cooling the substrate under a nitrogen overpressure.
John F. Kaeding - Mountain View CA, US Dong-Seon Lee - Anyang-Si, KR Michael Iza - Santa Barbara CA, US Troy J. Baker - Raleigh NC, US Hitoshi Sato - Kanagawa, JP Benjamin A. Haskell - Santa Barbara CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA Japan Science and Technology Agency - Saitama Prefecture
International Classification:
H01L 29/20
US Classification:
257615, 257E3306, 257E29089, 438 22, 117 84
Abstract:
A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow of nitrogen and/or hydrogen and/or ammonia, depositing an InGaN nucleation layer on the heated substrate, depositing a semipolar nitride semiconductor thin film on the InGaN nucleation layer, and cooling the substrate under a nitrogen overpressure.
Single Or Multi-Color High Efficiency Light Emitting Diode (Led) By Growth Over A Patterned Substrate
Claude C. A. Weisbuch - Paris, FR Aurelien J. F. David - Palo Alto CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01L 29/22
US Classification:
257 98, 257 79, 257431, 257435, 257E33067, 438 22
Abstract:
An opto-electronic device, and a method of fabricating same, wherein the device has a patterned layer that includes a patterned, pierced or perforated mask, and an active layer formed over the patterned layer, wherein a refractive index of the patterned layer and a pattern of holes in the patterned layer are configured for controlling confinement or extraction of light emissions of the active layer into radiative and guided modes.
Use Of Alkaline-Earth Metals To Reduce Impurity Incorporation Into A Group-Iii Nitride Crystal Grown Using The Ammonothermal Method
The Regents of the University of California - Oakland CA, US Paul M. von Dollen - Santa Barbara CA, US James S. Speck - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
C30B 7/10
US Classification:
25251914, 117 71, 117224
Abstract:
Alkaline-earth metals are used to reduce impurity incorporation into a Group-III nitride crystal grown using the ammonothermal method.
Suppression Of Relaxation By Limited Area Epitaxy On Non-C-Plane (In,Al,B,Ga)N
The Regents of the University of California - Oakland CA, US Shuji Nakamura - Santa Barbara CA, US Steven P. DenBaars - Goleta CA, US James Stephen Speck - Goleta CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
H01L 29/15 H01L 21/20
US Classification:
257 14, 438504, 257E29078, 257E2109
Abstract:
An (AlInGaN) based semiconductor device, including one or more (In,Al)GaN layers overlying a semi-polar or non-polar III-nitride substrate or buffer layer, wherein the substrate or buffer employs patterning to influence or control extended defect morphology in layers deposited on the substrate; and one or more (AlInGaN) device layers above and/or below the (In,Al)GaN layers.
Hole Blocking Layer For The Prevention Of Hole Overflow And Non-Radiative Recombination At Defects Outside The Active Region
The Regents of the University of California - Oakland CA, US Po Shan Hsu - Arcadia CA, US Steven P. DenBaars - Goleta CA, US James Stephen Speck - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
H01L 29/201 H01S 5/343 H01L 33/04
US Classification:
372 45012, 257 15, 257 13, 257E29168, 257E33032
Abstract:
An (Al,In,B,Ga)N based device including a plurality of (Al,In,B,Ga)N layers overlying a semi-polar or non-polar GaN substrate, wherein the (Al,In,B,Ga)N layers include at least a defected layer, a blocking layer, and an active region, the blocking layer is between the active region and the defected layer of the device, and the blocking layer has a larger band gap than surrounding layers to prevent carriers from escaping the active region to the defected layer. One or more (AlInGaN) device layers are above and/or below the (Al,In,B,Ga)N layers. Also described is a nonpolar or semipolar (Al,In,B,Ga)N based optoelectronic device including at least an active region, wherein stress relaxation (Misfit Dislocation formation) is at heterointerfaces above and/or below the active region.
Optoelectronic Device Based On Non-Polar And Semi-Polar Aluminum Indium Nitride And Aluminum Indium Gallium Nitride Alloys
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA, US Zhen Chen - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
H01L 33/30
US Classification:
257 13
Abstract:
A high-power and high-efficiency light emitting device with emission wavelength (λ) ranging from 280 nm to 360 nm is fabricated. The new device structure uses non-polar or semi-polar AlInN and AlInGaN alloys grown on a non-polar or semi-polar bulk GaN substrate.
Khosla persuaded Nakamura, DenBaars and their colleague James Speck to found a company. He was, and is, convinced that their particular variation on LEDs the only one to use gallium nitride crystals on a substrate made of the same material was the best available.
Now, a definitive measurement of this complex process has been accomplished by James Speck and Claude Weisbuch of UCSB, in collaboration with colleagues at cole Polytechnique in France. The achievement, which could help optimize cost per lumen, could put the technology back into the spotlight