James Michael Webster

US Patent:

7733552, Jun 8, 2010

Filed:

Mar 21, 2007

Appl. No.:

11/689430

Inventors:

Ana R. Londergan - Santa Clara CA, US
Bangalore R. Natarajan - Cupertino CA, US
Evgeni Gousev - Saratoga CA, US
James Randolph Webster - San Jose CA, US
David Heald - Solvang CA, US

Assignee:

Qualcomm Mems Technologies, Inc - San Diego CA

International Classification:

G02F 1/00

US Classification:

359237

Abstract:

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

US Patent:

7787130, Aug 31, 2010

Filed:

Mar 31, 2008

Appl. No.:

12/060110

Inventors:

James Randolph Webster - San Jose CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G01B 9/02

US Classification:

356519

Abstract:

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

US Patent:

7787171, Aug 31, 2010

Filed:

Mar 31, 2008

Appl. No.:

12/060041

Inventors:

James Randolph Webster - San Jose CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G02B 26/00

US Classification:

359291, 359290

Abstract:

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

US Patent:

7851239, Dec 14, 2010

Filed:

Jun 5, 2008

Appl. No.:

12/133813

Inventors:

James Randolph Webster - San Jose CA, US
Thanh Nghia Tu - San Jose CA, US
Xiaoming Yan - Sunnyvale CA, US
Wonsuk Chung - San Jose CA, US

Assignee:

Qualcomm MEMS Technologies, Inc. - San Diego CA

International Classification:

H01L 21/00

US Classification:

438 29, 438 50, 257E21536

Abstract:

Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

US Patent:

7852491, Dec 14, 2010

Filed:

Mar 31, 2008

Appl. No.:

12/060078

Inventors:

James Randolph Webster - San Jose CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G01B 9/02

US Classification:

356519

Abstract:

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

US Patent:

8077326, Dec 13, 2011

Filed:

Mar 31, 2008

Appl. No.:

12/060090

Inventors:

James Randolph Webster - San Jose CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G01B 9/02

US Classification:

356519

Abstract:

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

US Patent:

8138479, Mar 20, 2012

Filed:

Sep 14, 2009

Appl. No.:

12/559085

Inventors:

Manish Kothari - Cupertino CA, US
James Randolph Webster - San Jose CA, US
Gaurav Sethi - Dublin CA, US
Alok Govil - Santa Clara CA, US
Jonathan Charles Griffiths - Fremont CA, US

Assignee:

QUALCOMM MEMS Technologies, Inc. - San Diego CA

International Classification:

G01J 1/42

US Classification:

250353

Abstract:

Methods and systems for providing a light device that can emit light and sense light are disclosed. In one embodiment, a lighting device includes a light guide having a planar first surface, the light guide configured such that at least some ambient light enters the light guide through the first surface and propagates therein, and at least one light detector disposed along an edge of the light guide, the at least one detector optically coupled to the light guide to receive light propagating therein. The light detector can be configured to produce a control signal. In some embodiments, the lighting device also includes at least one light turning feature disposed on the first surface, the at least one light turning feature configured to direct light incident into the light guide through the first surface.

US Patent:

8164815, Apr 24, 2012

Filed:

Jun 7, 2010

Appl. No.:

12/795294

Inventors:

Ana R. Londergan - Santa Clara CA, US
Bangalore R. Natarajan - Cupertino CA, US
Evgeni Gousev - Saratoga CA, US
James Randolph Webster - San Jose CA, US
David Heald - Solvang CA, US

Assignee:

Qualcomm Mems Technologies, Inc. - San Diego CA

International Classification:

G02F 1/00

US Classification:

359237

Abstract:

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.