Jan D Reimer

US Patent:

42138183, Jul 22, 1980

Filed:

Jan 4, 1979

Appl. No.:

6/001039

Inventors:

Kyle E. Lemons - San Jose CA
Richard C. Blish - Los Gatos CA
Jan D. Reimer - Palo Alto CA

Assignee:

Signetics Corporation - Sunnyvale CA

International Classification:

H01L 21306
C23F 102

US Classification:

156643

Abstract:

Selective plasma vapor etching process for performing operations on a solid body formed of at least two different materials capable of being vapor etched exposed at, at least, one surface of the body, with the body being disposed in a chamber having a partial vacuum therein. A gas plasma is created within the chamber to produce active species of atoms and molecules so that these species come into contact with the surface of the body to chemically react at least one of the materials with active species from the gas plasma to form a gas-non-gaseous chemical reaction by controlling the concentration and reaction kinetics of specific species, and by controlling the activation energy of the etching reactions to produce a difference in rates between the materials so that the etching is more selective to one material over the other. The species is also controlled by the frequency of the electromagnetic energy.

US Patent:

47453605, May 17, 1988

Filed:

May 1, 1986

Appl. No.:

6/858613

Inventors:

Jan D. Reimer - Palo Alto CA
Victor R. Akylas - San Jose CA

Assignee:

North American Phillips Corporation, Signetics Division - Sunnyvale CA

International Classification:

G01R 1900
G01R 3500

US Classification:

324158R

Abstract:

A test device (40) has a patterned conductive layer (42 or 44) particularly adapted for use in an E-beam probe system (FIG. 3) to study how local electric fields influence probe voltage measurements. The layer is composed of two or more conductors (A and B. sub. J C and D. sub. J) separated from each other. Each conductor has a group of fingers. The fingers (F1. sub. p, F0. sub. p, F2, F0. sub. Q and F1. sub. Q) run parallel to one another and are at least partially interdigitated. The width of each finger is constant along its length. The widths of the fingers and the spacings between them vary from finger to finger according to a selected pattern.