Jane Y Lin

US Patent:

6396118, May 28, 2002

Filed:

Feb 3, 2000

Appl. No.:

09/496941

Inventors:

Jeremy A. Theil - Mountain View CA
Jane Mei-Jech Lin - San Jose CA
Min Cao - Mountain View CA
Gary W. Ray - Mountain View CA
Shawming Ma - Sunnyvale CA
Xin Sun - San Jose CA

Assignee:

Agilent Technologies, Inc. - Palo Alto CA

International Classification:

H01L 3100

US Classification:

257444, 257458, 257656, 257290, 257291, 257 59, 257 72

Abstract:

An array of active pixel sensors includes a substrate. An interconnect structure is formed adjacent to the substrate. The interconnect structure includes a plurality of conductive vias. A plurality of photo sensors are formed adjacent to the interconnect structure. Each photo sensor includes a pixel electrode. Each pixel electrode is electrically connected to the substrate through a corresponding conductive yet. A I-layer is formed over each of the pixel electrodes. The array of active pixel sensors further includes a conductive mesh formed adjacent to the photo sensors. An inner surface of the conductive mesh is electrically and physically connected to the photo sensors, and electrically connected to the substrate through a conductive via. The conductive mesh providing light shielding between photo sensors thereby reducing cross-talk between the photo sensors. The conductive mesh includes apertures that align with at least one of the pixel electrodes of the photo sensors.