Janet Mary Robertson

US Patent:

54172357, May 23, 1995

Filed:

Jul 28, 1993

Appl. No.:

8/098738

Inventors:

Kensall D. Wise - Ann Arbor MI
Janet K. Robertson - Ann Arbor MI
Jin Ji - White Plains NY

Assignee:

Regents of the University of Michigan - Ann Arbor MI

International Classification:

F16K 3102

US Classification:

137 1

Abstract:

Micromachined microvalves are held both open and closed electrostatically to maintain uniform gas microflow and improve closure characteristics. A microflow controller containing such a valve is combined with a predetermined restricted flow path. Multiple valve/restrictive flow path combinations are integrated on a binary flow path basis. Single and/or multiple valve actuation provides precise but variable flow control. Temperature and pressure sensors can be integrally included. Various valve and controller configurations, and methods of controlling them and forming them, are disclosed.