Jason Mc Donald

US Patent:

20130344292, Dec 26, 2013

Filed:

Jul 23, 2013

Appl. No.:

13/948364

Inventors:

Greg Clark - Hillsboro OR, US
Todd Hanson - Beaverton OR, US
Scott Edward Fuller - Portland OR, US
Jason Donald - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

H01J 37/30

US Classification:

428157, 4281951, 4251744

Abstract:

A method and system for forming and using a fiducial on a sample to locate an area of interest on the sample, the method comprising forming a fiducial by depositing a block of material on a sample proximal to an area of interest on the sample, the block of material extending from the surface of the sample to a detectable extent above the surface of the sample; and milling, using a charged particle beam, a predetermined pattern into at least two exposed faces of the block of material; subsequent to forming the fiducial, detecting the location of the area of interest by detecting the location of the fiducial; and subsequent to detecting the location of the area of interest, imaging or milling the area of interest with a charged particle beam.

US Patent:

8502172, Aug 6, 2013

Filed:

Jun 26, 2012

Appl. No.:

13/533870

Inventors:

Cliff Bugge - Portland OR, US
Greg Clark - Hillsboro OR, US
Todd Hanson - Beaverton OR, US
Scott Edward Fuller - Portland OR, US
Jason Donald - Portland OR, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

H01J 37/30

US Classification:

2504921, 2504922

Abstract:

A method and system for forming and using a fiducial on a sample to locate an area of interest on the sample, the method comprising forming a fiducial by depositing a block of material on a sample proximal to an area of interest on the sample, the block of material extending from the surface of the sample to a detectable extent above the surface of the sample; and milling, using a charged particle beam, a predetermined pattern into at least two exposed faces of the block of material; subsequent to forming the fiducial, detecting the location of the area of interest by detecting the location of the fiducial; and subsequent to detecting the location of the area of interest, imaging or milling the area of interest with a charged particle beam.

US Patent:

20190172680, Jun 6, 2019

Filed:

Jan 29, 2019

Appl. No.:

16/260913

Inventors:

- Hillsboro OR, US
Jason DONALD - Portland OR, US
Termsupt SEEMUNTCHAIBOWORN - Bangkok, TH

International Classification:

H01J 37/317
H01J 37/304
H01J 37/305
H01J 37/22
H01J 37/28
H01J 37/30

Abstract:

To expose a desired feature, focused ion beam milling of thin slices from a cross section alternate with forming a scanning electron image of each newly exposed cross section. Milling is stopped when automatic analysis of an electron beam image of the newly exposed cross section shows that a predetermined criterion is met.

US Patent:

20160126060, May 5, 2016

Filed:

Jul 16, 2012

Appl. No.:

14/766953

Inventors:

Scott Edward Fuller - Portland OR, US
Jason Donald - Portland OR, US
Termsupt Seemuntchaiboworn - Bangkok, TH

International Classification:

H01J 37/317
H01J 37/28
H01J 37/22
H01J 37/30

Abstract:

To expose a desired feature, focused ion beam milling of thin slices from a cross section alternate with forming a scanning electron image of each newly exposed cross section. Milling is stopped when automatic analysis of an electron beam image of the newly exposed cross section shows that a pre-determined criterion is met.