Jason M Lamb

US Patent:

20160068951, Mar 10, 2016

Filed:

Oct 23, 2014

Appl. No.:

14/522350

Inventors:

- Santa Clara CA, US
Jun Tae CHOI - Cupertino CA, US
Rupankar CHOUDHURY - BANGALORE, IN
Zhong Qiang HUA - Saratoga CA, US
Juan Carlos ROCHA-ALVAREZ - San Carlos CA, US
Jason Michael LAMB - Sunnyvale CA, US

International Classification:

C23C 16/44
C23C 16/50

Abstract:

Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.