Jason R Osborne

US Patent:

7429732, Sep 30, 2008

Filed:

Sep 30, 2005

Appl. No.:

11/241093

Inventors:

David A. Kneeburg - Santa Barbara CA, US
Rohit Jain - Ventura CA, US
Jason R. Osborne - Lompoc CA, US
Wei Yao - Ventura CA, US
Matthew T. Klonowski - Santa Barbara CA, US
Ingo Schmitz - Santa Barbara CA, US

Assignee:

Veeco Instruments Inc. - Plainview NY

International Classification:

G01N 23/00

US Classification:

250306, 73105, 977849, 977850, 977851, 977854

Abstract:

The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features of a sample. This is accomplished by selecting a step distance between adjacent lines of the survey scan that does not equal the pitch of the features in a direction orthogonal to the direction the survey scan traverses, i. e. , does not equal the pitch of the features in the scan direction, X. The aspect ratio of the scans can also be modified to further improve sample throughput.

US Patent:

7665349, Feb 23, 2010

Filed:

May 19, 2005

Appl. No.:

11/132959

Inventors:

Paul I. Mininni - Montreal, CA
Jason R. Osborne - Lompoc CA, US
James M. Young - Santa Barbara CA, US
Charles R. Meyer - Santa Barbara CA, US

Assignee:

Veeco Instruments Inc. - Plainview NY

International Classification:

G01Q 10/00
G01Q 60/24

US Classification:

73105

Abstract:

A method and apparatus of engaging a probe with a sample surface including automatically reducing the spacing between a probe of a probe based instrument and a sample from an initial separation to one in which the probe is positioned for obtaining a sample surface measurement in less than ten seconds without damaging either the probe or the sample. The method includes oscillating the probe, measuring at least one parameter of probe oscillation and then engaging the probe and the sample by generally continuously controlling the reducing step based on the measuring step to reduce the separation from an initial separation to an engage position. In addition to feeding back directly on the tip-sample interaction, a direct communication line is provided between the processor used to generate control signals that govern the engage and a conventional motion controller. In an alternative, a coarse positioning actuator and a fine positioning actuator in which the control of both is coordinated under feedback to place the probe in the engaged position, and wherein the close approach phase of the algorithm is controlled by a dedicated real time controller.

US Patent:

20220326277, Oct 13, 2022

Filed:

Apr 9, 2021

Appl. No.:

17/226970

Inventors:

- Santa Barbara CA, US
James Young - Santa Barbara CA, US
Jason Osborne - Lompoc CA, US
Sean Hand - Santa Barbara CA, US

International Classification:

G01Q 30/06
G01Q 60/24
G06T 5/00
G06T 5/50
G06T 5/20

Abstract:

A method of operating an atomic force microscope (AFM), using a denoising algorithm, real-time, during AFM data acquisition. Total Variation and Non-Local Means denoising are preferred. Real time images with minimized sensor noise needing no post-image acquisition processing to account for noise as described herein results.

US Patent:

20230009857, Jan 12, 2023

Filed:

Jul 8, 2021

Appl. No.:

17/370624

Inventors:

- Santa Barbara CA, US
Jason Osborne - Lompoc CA, US
Sean Hand - Santa Barbara CA, US

International Classification:

G01Q 60/38
G01Q 10/06
G01Q 30/06
B82Y 35/00

Abstract:

A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.

US Patent:

20210396784, Dec 23, 2021

Filed:

Jun 18, 2021

Appl. No.:

17/352001

Inventors:

- Santa Barbara CA, US
Shuiqing Hu - Santa Barbara CA, US
Jason Osborne - Lompoc CA, US
Chanmin Su - Ventura CA, US

International Classification:

G01Q 80/00

Abstract:

A mechanical method of removing nanoscale debris from a sample surface using an atomic force microscope (AFM) probe. The probe is shaped to include an edge that provides shovel-type action on the debris as the probe is moved laterally to the sample surface. Advantageously, the probe is able to lift the debris without damaging the debris for more efficient cleaning of the surface. The edge is preferably made by focused ion beam (FIB) milling the diamond apex of the tip.