Jason J Osborne

US Patent:

7665349, Feb 23, 2010

Filed:

May 19, 2005

Appl. No.:

11/132959

Inventors:

Paul I. Mininni - Montreal, CA
Jason R. Osborne - Lompoc CA, US
James M. Young - Santa Barbara CA, US
Charles R. Meyer - Santa Barbara CA, US

Assignee:

Veeco Instruments Inc. - Plainview NY

International Classification:

G01Q 10/00
G01Q 60/24

US Classification:

73105

Abstract:

A method and apparatus of engaging a probe with a sample surface including automatically reducing the spacing between a probe of a probe based instrument and a sample from an initial separation to one in which the probe is positioned for obtaining a sample surface measurement in less than ten seconds without damaging either the probe or the sample. The method includes oscillating the probe, measuring at least one parameter of probe oscillation and then engaging the probe and the sample by generally continuously controlling the reducing step based on the measuring step to reduce the separation from an initial separation to an engage position. In addition to feeding back directly on the tip-sample interaction, a direct communication line is provided between the processor used to generate control signals that govern the engage and a conventional motion controller. In an alternative, a coarse positioning actuator and a fine positioning actuator in which the control of both is coordinated under feedback to place the probe in the engaged position, and wherein the close approach phase of the algorithm is controlled by a dedicated real time controller.

US Patent:

20230009857, Jan 12, 2023

Filed:

Jul 8, 2021

Appl. No.:

17/370624

Inventors:

- Santa Barbara CA, US
Jason Osborne - Lompoc CA, US
Sean Hand - Santa Barbara CA, US

International Classification:

G01Q 60/38
G01Q 10/06
G01Q 30/06
B82Y 35/00

Abstract:

A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.