Jason R Reid

US Patent:

6958123, Oct 25, 2005

Filed:

Jun 10, 2002

Appl. No.:

10/167272

Inventors:

Jason S. Reid - Los Gatos CA, US
Nungavaram S. Viswanathan - San Jose CA, US

Assignee:

Reflectivity, INC - Sunnyvale CA

International Classification:

C23F001/00
H01L021/00

US Classification:

216 2, 216 13, 216 27, 216 40, 216 56, 216 92, 438 48

Abstract:

A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.

US Patent:

6960305, Nov 1, 2005

Filed:

Mar 28, 2003

Appl. No.:

10/402777

Inventors:

Jonathan C. Doan - Mountain View CA, US
Satyadev R. Patel - Elk Grove CA, US
Andrew G. Huibers - Palo Alto CA, US
Jason S. Reid - Los Gatos CA, US

Assignee:

Reflectivity, Inc - Sunnyvale CA

International Classification:

B81C001/00

US Classification:

216 2, 216 79, 438 48

Abstract:

A method for making a spatial light modulator is disclosed, that comprises forming an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a hinge made of a transition metal nitride, followed by releasing the micromirrors in a spontaneous gas phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

US Patent:

6974970, Dec 13, 2005

Filed:

Jan 17, 2003

Appl. No.:

10/346449

Inventors:

Juha T. Rantala - Helsinki, FI
Jason S. Reid - Los Gatos CA, US
T. Teemu T. Tormanen - Espoo, FI

Assignee:

Silecs Oy - Espoo

International Classification:

H01L035/24

US Classification:

257 40, 257642, 257750, 427223, 427535, 430302

Abstract:

Thin films are disclosed that are suitable as dielectrics in IC's and for other similar applications. In particular, the invention concerns thin films comprising compositions obtainable by hydrolysis of two or more silicon compounds, which yield an at least partially cross-linked siloxane structure. The invention also concerns a method for producing such films by preparing siloxane compositions by hydrolysis of suitable reactants, by applying the hydrolyzed compositions on a substrate in the form of a thin layer and by curing the layer to form a film. In one example, a thin film comprising a composition is obtained by hydrolyzing a monomeric silicon compound having at least one hydrocarbyl radical, containing an unsaturated carbon-to-carbon bond, and at least one hydrolyzable group attached to the silicon atom of the compound with another monomeric silicon compound having at least one aryl group and at least one hydrolyzable group attached to the silicon atom of the compound to form a siloxane material.

US Patent:

7057246, Jun 6, 2006

Filed:

Jul 20, 2001

Appl. No.:

09/910537

Inventors:

Jason S. Reid - Los Gatos CA, US

Assignee:

Reflectivity, INC - Sunnyvale CA

International Classification:

H01L 29/82

US Classification:

257417, 257254, 438 52

Abstract:

Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major constituents or impurities (e. g. additional group 3A to 6A element(s)).

US Patent:

7057251, Jun 6, 2006

Filed:

Jul 17, 2002

Appl. No.:

10/198389

Inventors:

Jason S. Reid - Los Gatos CA, US

Assignee:

Reflectivity, INC - Sunnyvale CA

International Classification:

H01L 31/0232

US Classification:

257432, 257444, 438 52

Abstract:

Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of an oxide of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a selected group 3A to 6A element, namely B, Al, In, Si, Ge, Sn, or Pb. The target can have other major constituents or impurities (e. g. additional group 3A to 6A element(s)).

US Patent:

7060634, Jun 13, 2006

Filed:

Jan 17, 2003

Appl. No.:

10/346451

Inventors:

Juha T. Rantala - Helsinki, FI
Jason S. Reid - Los Gatos CA, US
T. Teemu T. Tormanen - Espoo, FI

Assignee:

Silecs Oy - Espoo

International Classification:

H01L 21/31
H01L 21/469

US Classification:

438780, 438623, 438631, 438781, 438788, 438792, 257642, 257759

Abstract:

An integrated circuit is provided comprising a substrate and discrete areas of electrically insulating and electrically conductive material, wherein the electrically insulating material is a hybrid organic-inorganic material that has a density of 1. 45 g/cmor more and a dielectric constant of 3. 0 or less. The integrated circuit can be made by a method comprising: providing a substrate; forming discrete areas of electrically insulating and electrically conductive material on the substrate; wherein the electrically insulating material is deposited on the substrate followed by heating at a temperature of 350 C. or less; and wherein the electrically insulating material is a hybrid organic-inorganic material that has a density of 1. 45 g/cmor more after densification. Also disclosed is a method for making an integrated circuit comprising performing a dual damascene method with an electrically conductive material and a dielectric, the dielectric being a directly photopatterned hybrid organic-inorganic material.

US Patent:

7071520, Jul 4, 2006

Filed:

Jun 21, 2002

Appl. No.:

10/176478

Inventors:

Jason S. Reid - Los Gatos CA, US

Assignee:

Reflectivity, INC - Sunnyvale CA

International Classification:

G01L 1/12

US Classification:

257414, 257252, 257254, 257415

Abstract:

MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e. g.

US Patent:

7144827, Dec 5, 2006

Filed:

Jan 17, 2003

Appl. No.:

10/346539

Inventors:

Juha T. Rantala - Helsinki, FI
Jason S. Reid - Los Gatos CA, US
T Teemu T. Tormanen - Espoo, FI
Arto L. T. Maaninen - Oulu, FI

Assignee:

Silecs Oy - Espoo

International Classification:

H01L 21/31
H01L 21/469

US Classification:

438778, 438490, 562405

Abstract:

A method for making an integrated circuit is disclosed as comprising depositing alternating regions of electrically conductive and dielectric materials on a substrate, wherein an area of dielectric material is formed by: a silane precursor having a fully or partially fluorinated first organic group comprising an unsaturated carbon-carbon double bond, the fully or partially fluorinated organic group bound to silicon in the silane precursor; forming from the silane precursor a hybrid organic-inorganic material having a molecular weight of at least 500 on a substrate; and increasing the molecular weight of the hybrid material by exposure to heat, electromagnetic radiation or electron beam so as to break the unsaturated carbon-carbon double bond and cross link via the fully or partially fluorinated organic group. Also disclosed is a method for making an integrated circuit is disclosed as comprising: reacting a compound of the general formula X3MOR3, where X3 is a halogen, M is silicon, and OR3 is alkoxy; with a compound of the general formula R1M1; where R1 is selected from alkyl, alkenyl, aryl and alkynyl and wherein R1 is partially or.