Jeffrey C Ramer

US Patent:

8216419, Jul 10, 2012

Filed:

Jun 30, 2008

Appl. No.:

12/165269

Inventors:

Vahid S. Moshtagh - San Jose CA, US
Jeffrey C. Ramer - Sunnyvale CA, US

Assignee:

Bridgelux, Inc. - Livermore CA

International Classification:

C23F 1/00
H01L 21/306
C23C 16/00

US Classification:

15634534, 118715

Abstract:

A shower head for a chemical vapor deposition chamber can comprise a plurality of first injectors for a first reactant gas and a plurality of second injectors for a second reactant gas. The first and second injectors can be interspersed among one another so as to enhance control of the mixing and delivery of reactant gases within the chemical deposition chamber. Cooling water can be communicated through a plurality of gun drilled bores formed intermediate injectors of the shower head. In this manner, enhanced control of the mixing and delivery of reactant gases can be provided.

US Patent:

8232568, Jul 31, 2012

Filed:

Aug 21, 2009

Appl. No.:

12/545358

Inventors:

Ling Zhang - San Jose CA, US
Steven D. Lester - Palo Alto CA, US
Jeffrey C. Ramer - Sunnyvale CA, US

Assignee:

Bridgelux, Inc. - Livermore CA

International Classification:

H01L 33/00

US Classification:

257 94, 257 98, 257190, 257E51021

Abstract:

A light emitting device and method for making the same are disclosed. The device includes an active layer disposed between first and second layers. The first layer has top and bottom surfaces. The top surface includes a first material of a first conductivity type, including a plurality of pits in the substantially planar surface. The active layer overlies the top surface of the first layer and conforms to the top surface, the active layer generating light characterized by a wavelength when holes and electrons recombine therein. The second layer includes a second material of a second conductivity type, the second layer overlying the active layer and conforming to the active layer. The device can be constructed on a substrate having a lattice constant sufficiently different from that of the first material to give rise to dislocations in the first layer that are used to form the pits.

US Patent:

20090107403, Apr 30, 2009

Filed:

Mar 28, 2008

Appl. No.:

12/058380

Inventors:

Vahid S. Moshtagh - San Jose CA, US
Jeffrey C. Ramer - Sunnyvale CA, US

International Classification:

C23C 16/00

US Classification:

118728, 118715, 29428

Abstract:

A shower head for a chemical vapor deposition chamber can have a housing, a plurality of bosses formed upon the housing, and an inside cover. The bosses can have bores formed therethrough. The inside cover can be attached to the bosses and can have apertures formed therein such that the apertures are generally contiguous with the bores. The housing, the bosses, and the inside cover cooperate to communicate water through the shower head. The water can cool the shower head to a temperature that is substantially lower than the temperature of other parts of the chemical vapor deposition chamber, e.g., the susceptor thereof.