Jeffrey S Sharp

US Patent:

53306104, Jul 19, 1994

Filed:

May 28, 1993

Appl. No.:

8/068027

Inventors:

Djula Eres - Knoxville TN
Jeffrey W. Sharp - Knoxville TN

Assignee:

Martin Marietta Energy Systems, Inc. - Oak Ridge TN

International Classification:

C30B 2502

US Classification:

117 86

Abstract:

A method and apparatus for digital epitaxy. The apparatus includes a pulsed gas delivery assembly that supplies gaseous material to a substrate to form an adsorption layer of the gaseous material on the substrate. Structure is provided for measuring the isothermal desorption spectrum of the growth surface to monitor the active sites which are available for adsorption. The vacuum chamber housing the substrate facilitates evacuation of the gaseous material from the area adjacent the substrate following exposure. In use, digital epitaxy is achieved by exposing a substrate to a pulse of gaseous material to form an adsorption layer of the material on the substrate. The active sites on the substrate are monitored during the formation of the adsorption layer to determine if all the active sites have been filled. Once the active sites have been filled on the growth surface of the substrate, the pulse of gaseous material is terminated. The unreacted portion of the gas pulse is evacuated by continuous pumping.

US Patent:

52892875, Feb 22, 1994

Filed:

Oct 29, 1992

Appl. No.:

7/968625

Inventors:

Daniel J. Dargis - Knoxville TN
Larry S. Brown - Knoxville TN
Jeffrey L. Sharp - Knoxville TN

Assignee:

North American Philips Corporation - New York NY

International Classification:

H04N 574

US Classification:

358766

Abstract:

A projection television system which adapts automatically between from screen projection and rear screen projection upon insertion of the projector into a rear screen cabinet. A compact projection unit has a quick-disconnect electric connector and optical aligner which mate with connection elements in a projection cabinet upon insertion of the projector into an opening in the front of the cabinet. The cabinet has a two-mirror optical relay which inverts the projected picture. Upon completion of insertion, the electric connections automatically invert the image being projected by the projector. In another embodiment, insertion also automatically connects to audio equipment in the rear screen cabinet.

US Patent:

55407838, Jul 30, 1996

Filed:

May 26, 1994

Appl. No.:

8/249597

Inventors:

Djula Eres - Knoxville TN
Jeffrey W. Sharp - Knoxville TN

Assignee:

Martin Marietta Energy Systems, Inc. - Oak Ridge TN

International Classification:

C23C 1600

US Classification:

118725

Abstract:

A method and apparatus for digital epitaxy. The apparatus includes a pulsed gas delivery assembly that supplies gaseous material to a substrate to form an adsorption layer of the gaseous material on the substrate. Structure is provided for measuring the isothermal desorption spectrum of the growth surface to monitor the active sites which are available for adsorption. The vacuum chamber housing the substrate facilitates evacuation of the gaseous material from the area adjacent the substrate following exposure. In use, digital epitaxy is achieved by exposing a substrate to a pulse of gaseous material to form an adsorption layer of the material on the substrate. The active sites on the substrate are monitored during the formation of the adsorption layer to determine if all the active sites have been filled. Once the active sites have been filled on the growth surface of the substrate, the pulse of gaseous material is terminated. The unreacted portion of the gas pulse is evacuated by continuous pumping.