Michael J. McBride - Austin TX, US Jesse C. Ramos - Austin TX, US Mark E. Culp - Austin TX, US Matthew Ryskoski - Kyle TX, US Pirainder S. Lall - Austin TX, US
Assignee:
Advanced Micro Devices, Inc. - Austin TX
International Classification:
H01L 21/00 H01L 21/469
US Classification:
438 5, 438770, 438795
Abstract:
The present invention is generally directed to various advanced process control methodologies for thermal oxidation processes, and various systems for accomplishing same. In one illustrative embodiment, the method comprises measuring an ambient pressure of an environment external to an oxidation chamber, determining a correction factor based upon at least the measured ambient pressure, determining at least one parameter of a thermal oxidation process to be performed in the oxidation chamber based upon the determined correction factor, and performing the thermal oxidation process comprised of the determined parameter on at least one substrate positioned in the oxidation chamber.
Method Of Operating A Processing Chamber Used In Forming Electronic Devices
Michael B. Allen - Buda TX, US Jesse C. Ramos - Austin TX, US Jeffery P. Geuea - Bastrop TX, US Allan T. Nelson - Bastrop TX, US
Assignee:
SPANSION LLC - Sunnyvale CA
International Classification:
B05D 5/12
US Classification:
427 58
Abstract:
Provided herein is a method of processing an electronic device including operating a processing chamber at a first temperature while a workpiece is being processed and removing the workpiece and a carrier holding the workpiece from the processing chamber while decreasing the temperature within the processing chamber to a second temperature significantly lower than the first temperature. The method also includes increasing the temperature within the processing chamber to a third temperature significantly greater than the second temperature and significantly less than the first temperature while the processing chamber has no workpiece or carrier within.
Chemical Vapor Deposition System And Method Employing A Mass Flow Controller
Jesse C. Ramos - Austin TX Charles B. Silman - San Marcos TX
Assignee:
Advanced Micro Devices, Inc. - Sunnyvale CA
International Classification:
C23C 1600
US Classification:
118715
Abstract:
An LPCVD system is provided in which a mass flow controller is used to control the flow rate of gases passing from a reaction chamber to a vacuum pump. The mass flow controller is disposed within a secondary outlet conduit which connects a first point to a second point of a primary outlet conduit. The primary outlet conduit extends between and in gaseous communication with the reaction chamber and the vacuum pump. The secondary outlet conduit permits gases flowing from the reaction chamber to bypass a primary valve disposed within the outlet conduit downstream of the first point and upstream of the second point. The mass flow controller can advantageously maintain the flow rate of the gases at a setpoint value for a period of time before the flow rate begins to drop. As such, the mass flow controller provides for a reduction in the time required to evacuate the vacuum chamber.
Modified Thermocouple Mounting Bushing And System Including The Same
Jesse C. Ramos - Austin TX Blake A. Foster - Wimberley TX Allan T. Nelson - Bastrop TX
Assignee:
Advanced Micro Devices, Inc. - Sunnyvale CA
International Classification:
C23C 1600
US Classification:
118715
Abstract:
An LPCVD system is provided in which a thermocouple mounting system is configured to inhibit motion of a thermocouple with respect to an LPCVD reactor. The thermocouple mounting system includes an improved thermocouple mounting bushing that forms a fixable engagement with a thermocouple mounting hub. The thermocouple mounting bushing compresses a clip ring against both the thermocouple and the thermocouple mounting hub during use to inhibit motion of the thermocouple. The improved thermocouple mounting system inhibits contact between the thermocouple and a quartz liner within the reactor during use, thus minimizing formation of contaminating particles. The thermocouple mounting system further maintains the thermocouple in proper alignment according to design criteria such that accurate temperature readings are supplied to a temperature controller during use. In addition, the improved thermocouple mounting system prevents the thermocouple from being pulled into the reactor during use in the event an O-ring, also part of the thermocouple mounting system, is weakened or fails.
System And Method For Artificial Intelligence Driven Document Analysis, Including Automated Reuse Of Predictive Coding Rules Based On Management And Curation Of Datasets Or Models
- Austin TX, US Verlyn Michael Fischer - Cedar Park TX, US Richard Alan Vestal - Jonestown TX, US Jesse Abraham Ramos - Austin TX, US Robert Duane Harrington - Austin TX, US Brian Daniel Luskey - Ausitn TX, US
International Classification:
G06N 20/20 G06F 40/30 G06N 5/04
Abstract:
Artificial intelligence based document analysis systems and methods are disclosed. Embodiments of document analysis systems may allow the reuse of coded datasets defined in association with a particular code by allowing these datasets to be bundled to define a dataset for another code, where that code may be associated with a target corpus of documents. A model can then be trained based on that dataset and used to provide predictive scores for the documents of the target corpora with respect to the code. Furthermore, this code can be applied not just to the target corpus of documents, but additionally can be applied against any other corpora.
System And Method For Artificial Intelligence Driven Document Analysis, Including Automated Reuse Of Predictive Coding Rules Based On Management And Curation Of Datasets Or Models
- Austin TX, US Verlyn Michael Fischer - Cedar Park TX, US Richard Alan Vestal - Jonestown TX, US Jesse Abraham Ramos - Austin TX, US Robert Duane Harrington - Austin TX, US Brian Daniel Luskey - Austin TX, US
International Classification:
G06F 40/30 G06N 20/20 G06N 5/04
Abstract:
Artificial intelligence based document analysis systems and methods are disclosed. Embodiments of document analysis systems may allow the reuse of coded datasets defined in association with a particular code by allowing these datasets to be bundled to define a dataset for another code, where that code may be associated with a target corpus of documents. A model can then be trained based on that dataset and used to provide predictive scores for the documents of the target corpora with respect to the code. Furthermore, this code can be applied not just to the target corpus of documents, but additionally can be applied against any other corpora.