Jinggao Li

US Patent:

20120249983, Oct 4, 2012

Filed:

Mar 26, 2012

Appl. No.:

13/430159

Inventors:

Herman Vogel - Sandy Hook CT, US
Jeroen Gerard Gosen - Geldrop, NL
Bart Dinand Paarhuis - Waalre, NL
Frank Johannes Jacobus Van Boxtel - Eindhoven, NL
Jinggao Li - Fairfield CT, US

Assignee:

ASML NETHERLANDS B.V. - Veldhoven
ASML HOLDING N.V. - Veldhoven

International Classification:

G03B 27/42

US Classification:

355 53

Abstract:

An apparatus, in an embodiment, having a patterning device support including a first planar element having a first flow-restricting surface; a second planar element including a second flow-restricting surface facing the first flow-restricting surface; a support driver to linearly move the support along a certain direction relative to the second planar element, wherein the first and/or second flow-restricting surface has one or more projections and/or recesses between the first and second flow-restricting surfaces, and wherein the projection and/or recess on the first and/or second flow-restricting surface is arranged to provide a flow resistance, per unit width of the first and/or second flow-restricting surface perpendicular to the flow, that is lower against flow that is parallel to the certain direction than against flow that is perpendicular to the certain direction. The flow-restricting surfaces may direct gas flow onto a driver part that generates heat.

US Patent:

20110228239, Sep 22, 2011

Filed:

Mar 17, 2011

Appl. No.:

13/050476

Inventors:

Jeroen Gerard GOSEN - Geldrop, NL
Antonius Johannus Van Der Net - Tilburg, NL
Bart Dinand Paarhuis - Waalre, NL
Frank Johannes Jacobus Van Boxtel - Eindhoven, NL
Jinggao Li - Fairfield CT, US

Assignee:

ASML NETHERLANDS B.V. - Veldhoven
ASML HOLDING N.V. - Veldhoven

International Classification:

G03B 27/52

US Classification:

355 30

Abstract:

A gas curtain is provided to separate a component of a lithographic apparatus from contaminated gas. The gas curtain is supplied by an opening. The opening is at a boundary of a protection environment with which a surface of the component comes into contact. The gas curtain may separate the component from a moving part of the apparatus.