- Santa Clara CA, US Jethro TANNOS - San Jose CA, US Jingyi LI - San Jose CA, US Zhong Qiang HUA - Saratoga CA, US Srinivas D. NEMANI - Sunnyvale CA, US Ellie Y. YIEH - Sunnyvale CA, US
Embodiments of the present invention provide an apparatus and methods for depositing a dielectric material using RF bias pulses along with remote plasma source deposition for manufacturing semiconductor devices, particularly for filling openings with high aspect ratios in semiconductor applications. In one embodiment, a method of depositing a dielectric material includes providing a gas mixture into a processing chamber having a substrate disposed therein, forming a remote plasma in a remote plasma source and delivering the remote plasma to an interior processing region defined in the processing chamber, applying a RF bias power to the processing chamber in pulsed mode, and forming a dielectric material in an opening defined in a material layer disposed on the substrate in the presence of the gas mixture and the remote plasma.
- Santa Clara CA, US Jethro TANNOS - San Jose CA, US Jingyi LI - San Jose CA, US Zhong Qiang HUA - Saratoga CA, US Srinivas D. NEMANI - Sunnyvale CA, US Ellie Y. YIEH - Sunnyvale CA, US
Embodiments of the present invention provide an apparatus and methods for depositing a dielectric material using RF bias pulses along with remote plasma source deposition for manufacturing semiconductor devices, particularly for filling openings with high aspect ratios in semiconductor applications. In one embodiment, a method of depositing a dielectric material includes providing a gas mixture into a processing chamber having a substrate disposed therein, forming a remote plasma in a remote plasma source and delivering the remote plasma to an interior processing region defined in the processing chamber, applying a RF bias power to the processing chamber in pulsed mode, and forming a dielectric material in an opening defined in a material layer disposed on the substrate in the presence of the gas mixture and the remote plasma.
Name / Title
Company / Classification
Phones & Addresses
Jingyi Li President
Honey Toast Cafe, Inc
14424 Joanbridge St, Duarte, CA 91706
Jingyi Li President
Tasty Garden Irvine, Inc
14424 Joanbridge St, Duarte, CA 91706 166 Alta St, Arcadia, CA 91006
Jun 2009 to 2000 Asia Market Research AnalystWalt Disney World Orlando, FL Jul 2008 to Jan 2009 College Program InternshipChinese Olympic Committee "Marathon Team"
Apr 2008 to Jun 2008 Assistant of Operation and Volunteer Department
Education:
University of California Los Angeles Los Angeles, CA 2013 to 2013 project managementUniversity of California Los Angeles Los Angeles, CA 2011 to 2012 Chinese- English InterpretationMarietta College 2009 Master of International Corporate MediaCapital University of Economic and Business 2007 Bachelor of Business Administration
2012 to 2013 Intern, Assurance and Advisory Business Services DepartmentPeople's Bank of China Head Office
2012 to 2012 Assistant, Department of StatisticsAnalog DevicesChinaCo., Ltd
2011 to 2011 Accounting Assistant, Financial DepartmentXiamen International Bank Beijing Branch
2011 to 2011 Intern, Financial & Risk Management Department
Education:
FORDHAM UNIVERSITY, GRADUATE SCHOOL OF BUSINESS ADMINISTRATION New York, NY 2013 to 2015 MS in AccountingUniversity of International Business and Economics 2009 to 2013 BS in Management & insuranceUniversity of California Los Angeles, CA 2012 AccountingWilliam Paterson University of New Jersey 2010
Skills:
Microsoft Office, Lotus Notes, SPSS, Eviews, Bloomberg
Sep 2012 to 2000 Staff AccountantVITA San Francisco, CA Jan 2012 to Apr 2012 Volunteer Tax PreparerSan Francisco State University San Francisco, CA Oct 2011 to Dec 2011 Student AssistantSan Francisco State University San Francisco, CA Sep 2009 to Dec 2010 Chinese Tutor
Education:
San Francisco State University San Francisco, CA 2008 to 2012 Bachelor of Science in Business Administration Focus on Accounting
Youtube
LEO IU dance - Li Zhi, Nazneen & Jing Yi (Sea...
One of the dance performance that made the crowd go mad. :) Audiences ...
Category:
Entertainment
Uploaded:
24 Apr, 2008
Duration:
6m 22s
SNH48 Ju Jingyi - Li Bie De Che Zhan (Vicki Z...
Duration:
5m 51s
Jessica (Jingyi) Li "Statistical Methods for ...
Tuesday July 17, 2018 UCLA Faculty Center, California Room Computation...
Duration:
45m 29s
Portfolio videos by Jingyi Li
Duration:
2m 27s
Towards Balancing Real-World Awareness and VR...
Towards Balancing Real-World Awareness and VR Immersion in Mobile VR J...
Duration:
3m 4s
Jingyi Li, Immersive/Intera... Environment P...
I used unity to make these 7 interactive rooms, each with different sy...
Duration:
2m 50s
Googleplus
Jingyi Li
Lived:
Chengdu, china Los angeles, california Austin, texas Addison, texas Houston, texas