Joel W Robison

US Patent:

20150210430, Jul 30, 2015

Filed:

Aug 7, 2013

Appl. No.:

14/419458

Inventors:

- Billerica MA, US
Andy Krell - Spicewood TX, US
Mitchell W. McFeron - Austin TX, US
Steven Jackson - Burnet TX, US
Joel Robison - Bertram TX, US

Assignee:

ENTEGRIS, INC. - Billerica MA

International Classification:

B65D 25/14
H01L 21/67
B65D 85/00
B65D 25/38
B65D 43/02

Abstract:

A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.