John D Coffman

US Patent:

62863622, Sep 11, 2001

Filed:

Mar 31, 1999

Appl. No.:

9/282606

Inventors:

John Daniel Coffman - Austin TX
Jeffrey Gordon Lorge - Round Rock TX

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G01M 320

US Classification:

73 407

Abstract:

The present invention generally provides a leak detector having at least two partial pressure analyzers. The leak detector comprises a pumping system, a trace gas detector, and a residual gas analyzer. The leak detector is attachable to a test object, such as a vacuum system, and the pumping system operates to draw a vacuum therein. The residual gas analyzer determines the presence of oxygen, nitrogen, and other components of air in the test object. A trace gas, such as helium, provided to the exterior of the test system is monitored by the trace gas detector which may be a magnetic sector mass spectrometer. The residual gas analyzer and the trace gas detector may be operated simultaneously or independently.

Address:

916 Crestview Dr, Bedford, TX 76021

Phone:

8175140421

VIN:

JN8AS5MT9CW286968

Make:

NISSAN

Model:

ROGUE

Year:

2012