Skills:
Extensive experience in semiconductor processing in class 10 and class 100 cleanroom environments, primarily at MIT's Microsystems Technology Laboratories (MTL). Familiar with a wide variety of processing techniques including PECVD and LPCVD of silicon oxides and nitrides; ALD of metal nitrides as well as nitrides and oxides of Al, Hf, and Zr; RIE and DRIE techniques; photolithography including optical and contact lithography with thin and thick resist processing; metal evaporation and sputtering including lift-off processing; CMP, primarily of Si/SiGe and silicon oxides and nitrides for wafer bonding and epitaxy applications; general knowledge of III-V epitaxy on Si/Ge via MOCVD. Experience with a variety of metrological and materials characterization techniques including ellipsometry, profilometry, AFM, SEM, TEM, XRD, XPS, TXRF and SIMS. Experience with a variety of semiconducting materials including Ge, SiGe, Si, GaAs-like III-V materials, and InP-like III-V materials. Knowledge of contact metallurgy, surface passivation, and wet/dry processing of these materials. Strong background in semiconductor device physics with emphasis on MOSFETs and photovoltaic devices. Experience in measurement and characterization of MOS devices including CV and IV techniques. Characterization of carrier mobility, interface state density, and series resistance components, including analysis at cryogenic temperatures. Experience with solar simulator measurements for PV devices, including quantum efficiency and light biasing measurements. Knowledge of a variety of modeling and simulation software, including simple Schrodinger-Poisson solvers (SCHRED, 1DPoisson) for modeling carrier density and equivalent oxide thickness in MOS devices, and approximate tunneling widths in tunnel junction interconnect for MJ solar cells; more advanced device modeling (TCAD Sentaurus Device); process modeling (SUPREM); layout editing (L-Edit, klayout); SPICE based circuit simulators; PV modeling tools (PC1D) in order to estimate losses from reflection, absorption, and recombination in prototype solar cells; and basic programming or productivity software (MATLAB, Linux/Unix, Windows, MS Office).