John Survivors Howells

US Patent:

6566673, May 20, 2003

Filed:

Jun 29, 2001

Appl. No.:

09/895274

Inventors:

Alan Swan - Wilsonville OR
Thomas J. Hafner - Beaverton OR
John Howells - Redmond OR

Assignee:

Daitron Inc. - Wilsonville OR

International Classification:

G01N 2186

US Classification:

2505594, 25055945

Abstract:

An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

US Patent:

6545752, Apr 8, 2003

Filed:

Jun 29, 2001

Appl. No.:

09/895899

Inventors:

Alan J. Swan - Keiser OR
Thomas J. Hafner - Beaverton OR
John Howells - Redmond OR

Assignee:

Daitron, Inc. - Wilsonville OR

International Classification:

G01N 2100

US Classification:

3562374, 3562371, 3562375, 438 16

Abstract:

An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

US Patent:

6816251, Nov 9, 2004

Filed:

Oct 11, 2002

Appl. No.:

10/272310

Inventors:

Alan J Swan - Keiser OR
Thomas J. Hafner - Beaverton OR
John Howells - Redmond OR

Assignee:

Daitron, Inc. - Wilsonville OR

International Classification:

G01N 2188

US Classification:

3562374, 356244, 414416, 41422201, 2505594, 25055936

Abstract:

An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

US Patent:

60536683, Apr 25, 2000

Filed:

Aug 29, 1997

Appl. No.:

8/920432

Inventors:

Andrew P. Gorman - Portland OR
John Howells - West Linn OR
Randall W. Peltola - Hillsboro OR

Assignee:

Daitron, Inc. - Wilsonville OR

International Classification:

B65G 5316

US Classification:

406 86

Abstract:

A water slide for semiconductor wafer processing minimizes water usage by confining water to flow within spaced-apart grooves in the absence of a wafer. When a wafer passes down the water slide, a meniscus of water formed above the grooves is spread out to occupy the space underneath the wafer and prevent it from contacting the water slide as the wafer travels down the water slide.

US Patent:

59159103, Jun 29, 1999

Filed:

Aug 29, 1997

Appl. No.:

8/920476

Inventors:

John Howells - West Linn OR
Randall W. Peltola - Hillsboro OR

Assignee:

Daitron, Inc. - Willsonville OR

International Classification:

B65G 106

US Classification:

414331

Abstract:

A wafer transfer mechanism and method involves inserting a wafer carrying arm into position within a wafer cassette so that a wafer may be detachably coupled to the arm. The arm is moved linearly to position the arm for coupling to the wafer, with the motion being reversed to remove the wafer from the cassette. After the arm clears the cassette, the arm may be pivoted about an axis which is transverse to the longitudinal axis of the arm to invert the wafer and deposit it at a destination location, such as onto a conveyor. A vacuum may be used to detachably couple the wafer to the arm with the vacuum being relieved to release the wafer at the destination location. A puff or pulse of air may be used to assist in decoupling the wafer from the arm.

US Patent:

61526800, Nov 28, 2000

Filed:

Aug 26, 1997

Appl. No.:

8/918332

Inventors:

John Howells - West Linn OR
Robert H. Niemeyer - Tigard OR

Assignee:

Daitron, Inc. - Wilsonville OR

International Classification:

B65G 4907

US Classification:

414782

Abstract:

The present invention concerns a device for the rotation of a wafer cassette such as between a horizontal orientation and a vertical orientation. The wafer cassette rotation device includes a carriage for receiving and supporting a wafer cassette, a receptacle in which the carriage is supported and rotates, and a drive mechanism for rotating the carriage together with any wafer cassette that has been inserted into the carriage, between horizontal and vertical orientations. The carriage is shaped to receive a standard wafer cassette, the carriage open at both front and top portions, includes wafer cassette supports. Wheels may be attached to opposing side edges of the bottom of the carriage. A cam drive mechanism is used to move the carriage within the receptacle.

US Patent:

61831867, Feb 6, 2001

Filed:

Aug 29, 1997

Appl. No.:

8/920431

Inventors:

John Howells - West Linn OR
Andrew P. Gorman - Portland OR
Randall W. Peltola - Hillsboro OR

Assignee:

Daitron, Inc. - Wilsonville OR

International Classification:

B65G 4907

US Classification:

414416

Abstract:

Wafers from cassettes placed in a cassette holder at a loading station are transferred by a loader to a conveyor and through a wafer processing stage. From the conveyer, the wafers are delivered to an unloader at an unloading station. The unloader transfers the wafers to cassettes held in a cassette holder at the unloading station. The cassettes may be loaded into the rear of the loading station and removed from the rear of the unloading station. The cassette holders support plural stacks of at least two cassettes which are independently indexed upwardly and downwardly. The stacks of cassettes are also carried by a cassette positioner which is transversely shiftable to position a first stack in a wafer transfer zone while a second stack is in a cassette transfer zone spaced from the wafer transfer zone and vice versa. The loader may include an arm which is linearly translated and is rotated about its longitudinal axis to invert the wafer for delivery to a destination location. The unloader may be a water slide having a plurality of grooves for carrying water which spreads out from the grooves in the presence of a wafer to support the wafer as it slides down the water slide.