John S Keefe

US Patent:

8379204, Feb 19, 2013

Filed:

Aug 15, 2008

Appl. No.:

12/192915

Inventors:

James J. Cordingley - Littleton MA, US
Michael Plotkin - Newton MA, US
John Keefe - Londonderry NH, US

Assignee:

GSI Group Corporation - Bedford MA

International Classification:

G01B 11/00

US Classification:

356399, 356401

Abstract:

A method makes a discrete adjustment to static alignment of a laser beam in a machine for selectively irradiating conductive links on or within a semiconductor substrate using the laser beam. The laser beam propagates along a beam path having an axis extending from a laser to a laser beam spot at a location on or within the semiconductor substrate. The method generates, based on at least one measured characteristic of the laser beam, at least one signal to control an adjustable optical element of the machine affecting the laser beam path. The method also sends said at least one signal to the adjustable optical element. The method then adjusts the adjustable optical element in response to said at least one signal so as to improve static alignment of the laser beam path axis.