John N Pieper

US Patent:

7363195, Apr 22, 2008

Filed:

Jul 1, 2005

Appl. No.:

11/174022

Inventors:

Jeffrey M. Parker - Cedar Park TX, US
Wayne G. Renken - San Jose CA, US
John B. Pieper - Coralville IA, US

Assignee:

Sensarray Corporation - Santa Clara CA

International Classification:

G06F 17/40
G06F 19/00

US Classification:

702183, 702188, 702187

Abstract:

A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for network configuration.

US Patent:

8046193, Oct 25, 2011

Filed:

Apr 21, 2008

Appl. No.:

12/107007

Inventors:

Jeffrey M. Parker - Cedar Park TX, US
Wayne G. Renken - San Jose CA, US
John B. Pieper - Coralville IA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

G06F 17/40
G06F 19/00

US Classification:

702183, 702182, 702 84

Abstract:

A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for a more simplified configuration.