John T Strom

US Patent:

7062091, Jun 13, 2006

Filed:

Jan 14, 2002

Appl. No.:

10/047458

Inventors:

Carl S. Brown - Seattle WA, US
Ray H. Kraft - Seattle WA, US
John Timothy Strom - North Bend WA, US
Mark D. Cavelero - Everett WA, US

Assignee:

Applied Precision, LLC - Issaquah WA

International Classification:

G06K 9/32

US Classification:

382195, 382291, 382293, 358486, 358488

Abstract:

A scanning system is calibrated to correct for possible panel misalignments errors. A reference slide or data point is used to obtain a series of measurements with the scanning system. These measurements are compared with the expected results to determine systematic alignment errors in the scanning system. A model is created to correct the alignment errors during the scanning process, thus providing a plurality of more accurate scans. The plurality of scans may then be assembled to create a complete image of the scan area.

US Patent:

7102368, Sep 5, 2006

Filed:

Feb 27, 2004

Appl. No.:

10/788670

Inventors:

John T. Strom - North Bend WA, US

Assignee:

Applied Precision, LLC - Issaquah WA

International Classification:

G01R 31/02

US Classification:

324754, 324758, 382151

Abstract:

By examining scrub mark properties (such as position and size) directly, the performance of a wafer probing process may be evaluated. Scrub mark images are captured, image data measured, and detailed information about the process is extracted through analysis. The information may then be used to troubleshoot, improve, and monitor the probing process.

US Patent:

7170307, Jan 30, 2007

Filed:

Mar 12, 2004

Appl. No.:

10/799575

Inventors:

John T. Strom - North Bend WA, US

Assignee:

Applied Precision, LLC - Issaquah WA

International Classification:

G01R 31/02

US Classification:

324758, 324754

Abstract:

A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.

US Patent:

7231081, Jun 12, 2007

Filed:

Dec 18, 2002

Appl. No.:

10/323720

Inventors:

Donald B. Snow - Mercer Island WA, US
Raymond H. Kraft - Seattle WA, US
John T. Strom - North Bend WA, US

Assignee:

Applied Precision, LLC - Issaquah WA

International Classification:

G06K 9/00

US Classification:

382151, 382141, 382154, 382287, 356401

Abstract:

A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.

US Patent:

7385409, Jun 10, 2008

Filed:

Dec 12, 2006

Appl. No.:

11/609881

Inventors:

John T. Strom - North Bend WA, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G01R 31/02
G01R 31/28

US Classification:

324758, 324754

Abstract:

A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.

US Patent:

7579853, Aug 25, 2009

Filed:

Jun 10, 2008

Appl. No.:

12/136693

Inventors:

John T Strom - North Bend WA, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G01R 31/02

US Classification:

324754, 324758

Abstract:

A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.

US Patent:

7633306, Dec 15, 2009

Filed:

Mar 15, 2004

Appl. No.:

10/801944

Inventors:

John T. Strom - North Bend WA, US
Raymond H. Kraft - Seattle WA, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G01R 31/02

US Classification:

324758, 324754

Abstract:

A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an examplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.

US Patent:

7634128, Dec 15, 2009

Filed:

May 21, 2007

Appl. No.:

11/751617

Inventors:

Donald B. Snow - Mercer Island WA, US
John T. Strom - North Bend WA, US
Raymond H. Kraft - Seattle WA, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G06K 9/00

US Classification:

382151, 382141, 382154, 382287, 356401

Abstract:

A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.