Jon R Ebert

US Patent:

7050880, May 23, 2006

Filed:

Dec 30, 2003

Appl. No.:

10/751228

Inventors:

Dirk de Roover - San Jose CA, US
Abbas Emami-Naeini - Los Altos CA, US
Jon Lloyd Ebert - Gilroy CA, US

Assignee:

SC Solutions - Sunnyvale CA

International Classification:

G06F 19/00

US Classification:

700121, 700 28, 451134

Abstract:

The invention provides a model-based control approach to chemical-mechanical planarization (CMP) control. The preferred embodiment comprises mathematical models of the CMP process. These models play a critical role in obtaining superior control performance. Model-based Control Design involves the construction of a dynamic mathematical model of the system to be controlled, e. g. a removal rate model of a CMP system. The model can then be evaluated via computer simulations, and validated using data from the system. The invention provides a method and apparatus that processes in-situ data from a suite of real-time sensors and produces real-time commands to multiple actuators, such as applied pressures, slurry-flow rate, and wafer/pad velocity. A key aspect of the invention is an integrated model-based pressure-temperature-velocity-slurry flow control system that includes many innovations in real-time mode identification, real-time gain estimation, and real-time control.

US Patent:

58842357, Mar 16, 1999

Filed:

Dec 17, 1996

Appl. No.:

8/768915

Inventors:

Jon L. Ebert - Morgan Hill CA

Assignee:

Integrated Systems, Inc. - Sunnyvale CA

International Classification:

G01J 512
G01K 1300

US Classification:

702 87

Abstract:

A method and system are disclosed for measuring a temperature of a body in a non-contact mode based on heat flux measurement. The system includes a temperature measurement apparatus to be positioned in close proximity to a body for measuring the temperature of the body. The temperature measurement apparatus comprises a thermally conducting element, a first and a second temperature sensor, and a temperature modulation arrangement. The first and second temperature sensors are mounted in the conducting element and each measures a temperature of the conducting element. The temperature modulation arrangement modulates the temperature of the conducting element until the temperatures at the first and the second temperature sensors are substantially the same. When these temperatures are equalized, heat flux into the conducting element is zero and the temperature of the conducting element represents the temperature of the body. The apparatus thus enables accurate non-contact temperature measurement of a body.