Joseph F Geiger

US Patent:

42689775, May 26, 1981

Filed:

Dec 3, 1979

Appl. No.:

6/099665

Inventors:

Joseph T. Geiger - Houston TX

Assignee:

Exxon Research & Engineering Company - Florham Park NJ

International Classification:

F26B 2512

US Classification:

34242

Abstract:

A non-contact seal for thin film treating ovens to prevent leakage of gas both into and out of the oven at the film entry and exit points. An inert buffer gas is introduced into a narrow sealing slit defined between a pair of upper and lower sealing members adjacent the oven opening to buffer the oven gas leakage. An eductor passage also communicates with the sealing slit to carry away gas leakage resulting from thermal diffusion. Apparatus for precisely adjusting the height of the sealing slit to compensate for various film thicknesses and widths are provided. The temperature of the sealing members is regulated by the circulation of a fluid within passageways provided therein, thus to prevent thermal distortions of the slit defining surfaces.