Joseph C Mcginn

US Patent:

6370005, Apr 9, 2002

Filed:

Oct 14, 1999

Appl. No.:

09/417736

Inventors:

Hoi Cheong Sun - Dayton NJ
Nitin V. Desai - Princeton Junction NJ
William R. Roach - Rocky Hill NJ
David Norman Ludington - Newtown PA
Timothy Allen Pletcher - Eastampton NJ
David Keller - Newtown PA
Frank B. Lang - Princeton NJ
Peter D. Southgate - Monmouth Junction NJ
Joseph T. McGinn - Flemington NJ

Assignee:

Delsys Pharmaceutical Corporation - Monmouth Junction NJ

International Classification:

H02N 1300

US Classification:

361234

Abstract:

Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (E ) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

US Patent:

6724609, Apr 20, 2004

Filed:

Jan 4, 2002

Appl. No.:

10/038931

Inventors:

Hoi Cheong Sun - Dayton NJ
Nitin V. Desai - Princeton Junction NJ
William R. Roach - Rocky Hill NJ
David Norman Ludington - Newtown PA
Timothy Allen Pletcher - Eastampton NJ
David Keller - Newtown PA
Frank B. Lang - Princeton NJ
Peter D. Southgate - Monmouth Junction NJ
Joseph T. McGinn - Flemington NJ

Assignee:

Delsys Pharmaceutical Corporation - Monmouth Junction NJ

International Classification:

H02H 2300

US Classification:

361234, 361233

Abstract:

Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (E ) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Address:

101 Cir Rd, Staten Island, NY 10304

Phone:

7182261605

VIN:

WDDHF8HB7BA441519

Make:

MERCEDES-BENZ

Model:

E-CLASS

Year:

2011