Joshua L Robbins

US Patent:

8409351, Apr 2, 2013

Filed:

Aug 5, 2008

Appl. No.:

12/186112

Inventors:

Joshua Robbins - Golden CO, US
Michael Seman - Golden CO, US

Assignee:

SiC Systems, Inc. - Golden CO

International Classification:

C30B 23/06

US Classification:

117103, 117 84, 117 88, 117104, 117108, 427585, 427587, 427588, 427589, 427595, 427596, 4272481, 4272491

Abstract:

A method to grow a boule of silicon carbide is described. The method may include flowing a silicon-containing precursor and a carbon-containing precursor proximate to a heated filament array and forming the silicon carbide boule on a substrate from reactions of the heated silicon-containing and carbon-containing precursors. Also, an apparatus for growing a silicon carbide boule is described. The apparatus may include a deposition chamber to deposit silicon carbide on a substrate, and a precursor transport system for introducing silicon-containing and carbon-containing precursors into the deposition chamber. The apparatus may also include at least one filament or filament segment capable of being heated to a temperature that can activate the precursors, and a substrate pedestal to hold a deposition substrate upon which the silicon carbide boule is grown. The pedestal may be operable to change the distance between the substrate and the filament as the silicon carbide boule is grown.