John Robert Abernathey - Underhill VT Randy William Mann - Jericho VT Paul Christian Parries - Essex Junction VT Julie Anne Springer - Burlington VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 23532 H01L 23535
US Classification:
257413
Abstract:
A method of forming interconnections of devices of integrated circuits, especially interconnecting spaced source/drain regions and/or gate regions, and the resulting structures are provided. An etch-stop material such as silicon dioxide is deposited over the entire substrate on which the devices are formed. A layer of silicon is deposited over etch-stop material, and the silicon is selectively etched to reveal the etch-stop material at the regions to be connected. The etch-stop material at those regions is then removed. Following this a high-conductivity material, which is either a refractory metal or a silicide formed from layers of silicon and a refractory metal, is formed on the substrate connecting the spaced regions.
Method And Structure For Interconnecting Different Polysilicon Zones On Semiconductor Substrates For Integrated Circuits
John R. Abernathey - Underhill VT Randy W. Mann - Jericho VT Paul C. Parries - Essex Junction VT Julie A. Springer - Burlington VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2128
US Classification:
437192
Abstract:
A method of forming interconnections of devices of integrated circuits, especially interconnecting spaced source/drain regions and/or gate regions, and the resulting structures are provided. An etch-stop material such as silicon dioxide is deposited over the entire substrate on which the devices are formed. A layer of silicon is deposited over etch-stop material, and the silicon is selectively etched to reveal the etch-stop material at the regions to be connected. The etch-stop material at those regions is then removed. Following this a high-conductivity material, which is either a refractory metal or a silicide formed from layers of silicon and a refractory metal, is formed on the substrate connecting the spaced regions.
In her opening statement to jurors Monday, Baylor attorney Julie Springer acknowledged the school's history with sexual violence victims and the 2016 results of the investigation that uncovered failures in responding to and reporting incidents of sexual violence throughout the university.
Date: Oct 20, 2023
Category: Sports
Source: Google
Youtube
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