Semiconductor wafers exhibiting increased mechanical strength and reduced susceptibility to fracture and methods of making the same are disclosed. The improved mechanical strength arises from a thin coating of a refractory material deposited on the backside of the wafer. Preferably, the coating is comprised of a ceramic. More preferably, the coating is comprised of silicon carbide. Also disclosed are methods for evaluating different coating materials.
Method Of Increasing Mechanical Properties Of Semiconductor Substrates
Karl Yoder - Denison TX, US Bradley Sucher - McKinney TX, US
International Classification:
B32B009/04
US Classification:
428/446000
Abstract:
Semiconductor wafers exhibiting increased mechanical strength and reduced susceptibility to fracture and methods of making the same are disclosed. The improved mechanical strength arises from a thin coating of a refractory material deposited on the backside of the wafer. Preferably, the coating is comprised of a ceramic. More preferably, the coating is comprised of silicon carbide. Also disclosed are methods for evaluating different coating materials.
Texas Instruments
Dmos5 Section Manager, Plasma Equipment Engineering
Kinetics Jan 1995 - Aug 1995
Co-Op Engineer
Dietrich's Milk Products May 1994 - Aug 1994
Engineering Intern
Education:
University of North Texas 1999 - 2002
Master of Science, Masters, Materials Science
Penn State University 1993 - 1997
Bachelors, Bachelor of Science, Chemical Engineering
Schuylkill Valley High School
Pennsylvania State University
Skills:
Semiconductors Thin Films Characterization Fib Materials Science Manufacturing Nanotechnology Design of Experiments Yield Lean Manufacturing Electronics Process Integration Spc Failure Analysis Jmp Process Engineering Silicon Engineering Semiconductor Industry Plasma Etch Pvd Cmos
Oct 2008 to 2000 Section Manager, Plasma / Thin FilmTexas Instruments, Inc. Sherman, TX Aug 2004 to Sep 2008 Wafer Fab Engineer, MGTSTexas Instruments, Inc. Sherman, TX Jan 1998 to Jul 2004 Fab Quality Engineer
Education:
The University of North Texas Denton, TX 1999 to 2002 MS in Materials ScienceThe Pennsylvania State University University Park, PA 1993 to 1997 BS in Chemical Engineering
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2019-01-24 Rev. Karl Yoder
Kentucky Mountain Bible College (KMBC) Live Chapel Broadcast.
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2021-10-05 - Rev. Karl Yoder, "Attitude Adjus...
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2019-10-01 - Rev. Karl Yoder
Kentucky Mountain Bible College (KMBC) Live Chapel Broadcast.
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March 7, 2021 PM Service with Rev. Karl Yoder
Join us as Rev. Karl Yoder brings us the evening message from Luke 17 ...