Scott Elfstrom - Maplewood MN, US Kathleen L. Hanson - Savage MN, US Steven E. Haumersen - Woodbury MN, US Thomas D. Johnson - Star Prairie WI, US Clari Nolet - Los Altos CA, US William Smeaton - Edina MN, US
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.
Systems And Methods For Managing Material Storage Vessels Having Information Storage Elements
- Billerica MA, US Kathleen L. Hanson - Savage MN, US Steven E. Haumersen - Woodbury MN, US Thomas D. Johnson - Star Prairie WI, US Clari Nolet - Los Altos CA, US William Smeaton - Edina MN, US
Assignee:
ENTEGRIS, INC - Billerica MA
International Classification:
G06F 11/00 B67D 1/12 G01M 99/00
Abstract:
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.
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