Kenneth L Elias

US Patent:

46595856, Apr 21, 1987

Filed:

Jun 24, 1985

Appl. No.:

6/747598

Inventors:

Kenneth L. Elias - Essex Junction VT
Stuart R. Martin - Bristol VT
William J. Slattery - Essex Junction VT

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

B05D 306

US Classification:

427 5

Abstract:

A method of planarizing or smoothing the surface of a ceramic substrate by deposition of a silicon nitride layer. The silicon nitride in addition to planarizing the surface forms an alpha particle barrier. The substrates suitable for planarization with silicon nitride in accordance with the method of the present invention are sintered oxide particles which are bonded with a silicon bonding phase. The silicon content of the silicon bonding phase is greater than the silicon content of the aggregate of the oxide particles. The silicon nitride is preferably deposited by plasma enhanced chemical vapor deposition, and the silicon bonding phase is preferably a glass.

US Patent:

47613327, Aug 2, 1988

Filed:

Feb 24, 1987

Appl. No.:

6/937265

Inventors:

Kenneth L. Elias - Essex Junction VT
Stuart R. Martin - Bristol VT
William J. Slattery - Essex Junction VT

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

B32B 1800
B32B 900
B32B 1900

US Classification:

428325

Abstract:

A method of planarizing or smoothing the surface of a ceramic substrate by deposition of a silicon nitride layer. The silicon nitride in addition to planarizing the surface forms an alpha particle barrier. The substrates suitable for planarization with silicon nitride in accordance with the method of the present invention are sintered oxide particles which are bonded with a silicon bonding phase. The silicon content of the silicon bonding phase is greater than the silicon content of the aggregate of the oxide particles. The silicon nitride is preferably deposited by plasma enhanced chemical vapor deposition, and the silicon bonding phase is preferably a glass.