An apparatus (10) for electrolytic plating of a substrate (44) includes a tank (14) in which a shaft (30) is centrally mounted for rotation about a first axis (28). The shaft carries an arm (40), on the distal end (112) of which is rotatably mounted a fixture wheel (44). The substrate to be plated is carried on the fixture wheel, which rides on an annular track (50) formed on the bottom of the tank around the shaft. A plurality of spaced pins (52) projecting upwardly from the track engage with a plurality of spaced recesses (56) formed about the perimeter (54) of the wheel, so that the wheel rotates about a second axis (64) while revolving around the first axis. The fixture carries a plurality of electrical contact members (46) that contact the substrate. Each contact member is separately supplied with current from a multichannel power supply (22). For each electrical contact member, the fixture includes a separate corresponding conductive brush (162), bushing (142) and lead (48) threaded through the arm and shaft to the corresponding channel of the power supply.
Reciprocating Anode Electrolytic Plating Apparatus And Method
A plating system (10) for plating a substrate such as a semiconductor wafer (116) in an electrolytic tank (12). A fixture wheel (14) is mounted within the electrolytic tank to rotate about a first axis (140). The fixture wheel receives the semiconductor wafer and supplies electrical current to the perimeter edge of the wafer. A fixture wheel drive motor (90) drives rotation of the fixture wheel about the first axis. An anode assembly (18) is mounted in the tank spaced from and facing towards the fixture wheel and received semiconductor wafer. The anode assembly carries first and second anodes (72) which are supplied with electrical current. A second motor (142) causes reciprocation of the anode assembly transversely in front of the rotating fixture wheel for improved uniformity in plating thickness and composition.
Process Chamber And Method For Depositing And/Or Removing Material On A Substrate
Chiu H. Ting - Saratoga CA William H. Holtkamp - San Jose CA Wen C. Ko - San Jose CA Kenneth J. Lowery - San Dimas CA Peter Cho - Los Angeles CA
Assignee:
Cutek Research, Inc. - San Jose CA
International Classification:
C25D 700 C25D 502 C25D 712 C25F 330
US Classification:
205 80
Abstract:
A processing chamber for depositing and/or removing material onto/from a semiconductor wafer when the wafer is subjected to an electrolyte and in an electric field. A hollow sleeve is utilized to form a containment chamber for holding the electrolyte. A wafer residing on a support is moved vertically upward to engage the sleeve to form an enclosing floor for the containment chamber. One electrode is disposed within the containment chamber while the opposite electrode is comprised of several electrodes distributed around the circumference of the wafer. The electrodes are also protected from the electrolyte when the support is raised and engaged to the sleeve. In one embodiment, the support and the sleeve are stationary during processing, while in another embodiment, both are rotated or oscillated during processing.
A mounting arrangement for mounting a string trimmer to a host vehicle such as a ride-on mower or garden tractor. Functions provided by the mounting arrangement may include adjustment of height and inclination of the cutting head, and relocating the cutting head relative to the body of the host vehicle. The mounting arrangement may include a bumper for protecting the cutting head, cushioning of the mounting arrangement by springs to protect the cutting head from collisions, and transfer of liquid fuel from the fuel tank of the host vehicle to that of the string trimmer.
Name / Title
Company / Classification
Phones & Addresses
Kenneth J. Lowery President
Kenneth J Lowery Inc Whol Industrial Equipment
5844 Mccowans Fry Rd, Versailles, KY 40383 8598730438
Kenneth W. Lowery President
SEQUOIA HORIZONS, INC
PO Box 9, Tustin, CA 92781
Kenneth G. Lowery President
INTERLINER CORPORATION WHICH WILL DO BUSINESS IN CALIFORNIA AS INTERLINER FREIGHT SERVICES CORPORATION
3604 Est Ln STE 321, Palos Verdes Peninsula, CA 90274
Edgar Lockhart, Gabriella Sammassimo, Michele Roeder, David Diaz, Victoria Masluk, Tamara Faustin, Jojo Queen, Anthony Buttigieg, Maria Ciancio, Kam Brookins, Yolanda Barra, Jay Fernandez