Kenneth E Lyon

US Patent:

6605849, Aug 12, 2003

Filed:

Feb 14, 2002

Appl. No.:

10/077031

Inventors:

Robert Lutwak - Marblehead MA
Kenneth D. Lyon - Wilmington MA

Assignee:

Symmetricom, Inc. - Beverly MA

International Classification:

H01L 2984

US Classification:

257415, 257416

Abstract:

The present invention provides an analog frequency divider structure that receives an input signal at a selected frequency and generates an output signal at a fraction, e. g. one-half, of the input frequency. In one embodiment, the analog frequency divider structure is implemented as a MEMS device having a vibratory beam extending along a longitudinal axis between two fixed ends and a piezoelectric transducer coupled to the beam. The MEMS structure further includes a conductive layer disposed on at least a portion of the vibratory beam, which is capacitively coupled to a conductive electrode. A longitudinal excitation of the piezoelectric transducer can effect application of a periodic longitudinal deformation force to the vibratory beam. This deformation force causes the beam to vibrate in a transverse direction at its natural transverse vibrational frequency, which is selected to be a fraction of the input frequency. The conductive electrode capacitively couples to this transverse vibration to generate an output electrical signal at the transverse vibrational frequency.