Kenneth Murray

US Patent:

54326702, Jul 11, 1995

Filed:

Dec 13, 1993

Appl. No.:

8/166509

Inventors:

John S. Batchelder - Tarrytown NY
Vaughn P. Gross - St. Albans VT
Robert A. Gruver - Essex Junction VT
Philip C. D. Hobbs - Ossining NY
Kenneth D. Murray - Huntington VT

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H05F 306

US Classification:

361213

Abstract:

Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

US Patent:

53169700, May 31, 1994

Filed:

Jun 5, 1992

Appl. No.:

7/895181

Inventors:

John S. Batchelder - Tarrytown NY
Vaughn P. Gross - St. Albans VT
Robert A. Gruver - Essex Junction VT
Philip C. D. Hobbs - Ossining NY
Kenneth D. Murray - Huntington VT

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H05F 306

US Classification:

437173

Abstract:

Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

US Patent:

51165830, May 26, 1992

Filed:

Apr 29, 1991

Appl. No.:

7/696308

Inventors:

John S. Batchelder - Tarrytown NY
Vaughn P. Gross - St. Albans VT
Philip C. D. Hobbs - Ossining NY
Robert J. Miller - Yorktown Heights NY
Kenneth D. Murray - Huntington VT

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

B01J 1908
H01T 2300
H05F 300

US Classification:

42218607

Abstract:

A clean non-hydrogen-containing dry gas flows through the corona points of a clean room corona air ionizer in order to suppress the generation of particles.

US Patent:

20180145972, May 24, 2018

Filed:

Nov 22, 2016

Appl. No.:

15/358348

Inventors:

- Charlotte NC, US
Kenneth Gregory Murray - New York NY, US

International Classification:

H04L 29/06
H04L 29/08

Abstract:

Aspects of the disclosure relate to securely orchestrating events initiated at remote servers using a certificate server. A computing platform may receive, from a first server computer system, a first event request comprising first entity information and first event details information, and the computing platform may identify a first entity associated with the first event request. The, the computing platform may generate and send a first entity verification request to a certificate server, and the computing platform may receive, from the certificate server, first certificate information associated with the first entity. Based on validating the first certificate information associated with the first entity, the computing platform may generate and send, to a second server computer system, one or more event orchestration commands directing the second server computer system to execute one or more actions associated with the first event request.