Kenneth J Perkins

US Patent:

45534357, Nov 19, 1985

Filed:

Jul 19, 1983

Appl. No.:

6/515240

Inventors:

Harold Goldfarb - Irvine CA
Kenneth L. Perkins - Yorba Linda CA
Bernard L. Weigand - Fullerton CA

Assignee:

The United States of America as represented by the Secretary of the Air
Force - Washington DC

International Classification:

G01M 320

US Classification:

73 407

Abstract:

A novel method and apparatus for detecting leaks in glass-to-metal seals of microelectronic devices and the like are described which comprise a double-gasketed vacuum station including a base plate having a central hole and a first gasket for exposing one side of the seals to a leak detector; a vacuum fixture surrounding the device provides a marginal region therearound which can be evacuated to prevent helium from permeating the first gasket; the vacuum fixture includes a central opening to expose the other side of the seals to a helium-containing atmosphere within a shroud enclosing the device and vacuum fixture; a second gasket provides a seal between the vacuum fixture and device periphery at the central opening in the fixture. For leak tests under controlled time/temperature conditions, an adjacent infrared lamp is used to radiantly heat the package containing the glass-to-metal seals, and a mask is included to avoid direct radiant heating of the gaskets and glass-to-metal seals.