James R. Melcher - Lexington MA Kenneth S. Sachar - White Plains NY Karim Zahedi - Brookline MA
Assignee:
Massachusetts Institute of Technology - Cambridge MA
International Classification:
B03C 300
US Classification:
55 2
Abstract:
Apparatus for the high performance collection of gas entrained particulate, especially submicron particulate, consisting of a fluidized bed of collection sites with an electric field imposed on the bed so that the particulate to be collected, which is charged prior to entering the bed with the fluidizing gas, is electrically induced to agglomerate with the bed particles and the collected matter is removed in a fluidized state with the bed particles, which can consist of the collected material itself.
Kenneth S. Sachar - Brookline MA Victor J. Silvestri - Mount Kisco NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2342
US Classification:
165133
Abstract:
A silicon substrate adapted for large scale integrated electronic circuits upon a lower surface has its upper surface coated with a highly porous heat sink film. The film is composed of a porous metal, preferably aluminum, formed by vacuum deposition (evaporation or sputtering) at a high pressure of an inactive gas. The gas can have a pressure of from about 0. 5-100 millitorr, and a suitable gas is argon. A porous aluminum film with interconnected nucleation sites which are in the form of reservoir type cavities is manufactured on a silicon surface. The cavities tend to trap vapor of a liquid coolant in contact with the thin film contained in a package enclosing the substrate and its integrated circuit. Cooling fins can be used to cool the coolant.