Kevin P Lynch

US Patent:

6349588, Feb 26, 2002

Filed:

Mar 20, 2000

Appl. No.:

09/531475

Inventors:

Stuart B. Brown - Needham MA
Christopher L. Muhlstein - Brookline MA
Kevin R. Lynch - Somerville MA
Richard Mlcak - Cambridge MA
Paulo Jorge Furtado Correia - Cambridge MA

Assignee:

Exponent Inc. - Menlo Park CA

International Classification:

G01N 1904

US Classification:

73 37, 73150 A, 73 375

Abstract:

A system and corresponding method for bulge testing films (e. g. thin films, coatings, layers, etc. ) is provided, as well as membrane structures for use in bulge testing and improved methods of manufacturing same so that resulting membrane structures have substantially identical known geometric and responsive characteristics. Arrayed membrane structures, and corresponding methods, are provided in certain embodiments which enable bulge testing of a film(s) over a relatively large surface area via a plurality of different freestanding membrane portions. Improved measurements of film bulging or deflection are obtained by measuring deflection of a center point of a film, relative to non-deflected peripheral points on the film being tested. Furthermore, membrane structures are adhered to mounting structure in an improved manner, and opaque coatings may be applied over top of film(s) to be bulge tested so that a corresponding optical transducer can more easily detect film deflection/bulging. In certain embodiments, a laser triangulation transducer is utilized to measure film deflection/bulging.

US Patent:

63215942, Nov 27, 2001

Filed:

Mar 20, 2000

Appl. No.:

9/531474

Inventors:

Stuart B. Brown - Needham MA
Christopher L. Muhlstein - Brookline MA
Kevin R. Lynch - Somerville MA
Richard Mlcak - Cambridge MA
Paulo Jorge Furtado Correia - Cambridge MA

Assignee:

Exponent, Inc. - CA

International Classification:

G01N 310

US Classification:

73150

Abstract:

A system and corresponding method for bulge testing films (e. g. thin films, coatings, layers, etc. ) is provided, as well as membrane structures for use in bulge testing and improved methods of manufacturing same so that resulting membrane structures have substantially identical known geometric and responsive characteristics. Arrayed membrane structures, and corresponding methods, are provided in certain embodiments which enable bulge testing of a film(s) over a relatively large surface area via a plurality of different freestanding membrane portions. Improved measurements of film bulging or deflection are obtained by measuring deflection of a center point of a film, relative to non-deflected peripheral points on the film being tested. Furthermore, membrane structures are adhered to mounting structure in an improved manner, and opaque coatings may be applied over top of film(s) to be bulge tested so that a corresponding optical transducer can more easily detect film deflection/bulging. In certain embodiments, a laser triangulation transducer is utilized to measure film deflection/bulging.