Kevin A Peterson

US Patent:

6482754, Nov 19, 2002

Filed:

May 29, 2001

Appl. No.:

09/867869

Inventors:

Ebrahim Andideh - Portland OR
Kevin L. Peterson - Hillsboro OR

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

H01L 2131

US Classification:

438780, 438485, 438758, 438770

Abstract:

A method of forming a carbon doped oxide layer on a substrate is described. That method comprises introducing into a chemical vapor deposition apparatus a precursor gas that is selected from those having the formula (CH ) Si(OCH3). Simultaneously, a background gas, oxygen and nitrogen are introduced into the chemical vapor deposition apparatus. That apparatus is then operated under conditions that cause a carbon doped oxide layer to form on the substrate.

US Patent:

6677253, Jan 13, 2004

Filed:

Oct 5, 2001

Appl. No.:

09/972228

Inventors:

Ebrahim Andideh - Portland OR
Kevin L. Peterson - Hillsboro OR
Jeffery D. Bielefeld - Forest Grove OR

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

H01L 2131

US Classification:

438784, 438783

Abstract:

A method for carbon doped oxide (CDO) deposition is described. One method of deposition includes providing a substrate and introducing oxygen to a carbon doped oxide precursor in the presence of the substrate. A carbon doped oxide film is formed on the substrate. In another method the substrate is placed on a susceptor of a chemical vapor deposition apparatus. A background gas is introduced along with the carbon doped oxide precursor and oxygen to form the carbon doped oxide film on the substrate.

US Patent:

6680262, Jan 20, 2004

Filed:

Oct 25, 2001

Appl. No.:

10/007756

Inventors:

Ebrahim Andideh - Portland OR
Kevin L. Peterson - Hillsboro OR

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

H01L 2120

US Classification:

438780, 438485, 438513, 438788

Abstract:

A method of converting a hydrophobic surface of a dielectric layer to a hydrophilic surface is described. That method comprises forming a dielectric layer on a substrate, then operating a PECVD reactor to generate a plasma that converts the surface of that layer from a hydrophobic surface to a hydrophilic surface. Also described is a method for making a semiconductor device that employs this technique.

US Patent:

7125583, Oct 24, 2006

Filed:

May 23, 2002

Appl. No.:

10/154897

Inventors:

Ebrahim Andideh - Portland OR, US
Kevin L. Peterson - Hillsboro OR, US
Jeff Bielefeld - Forest Grove OR, US

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

C23C 16/40
H05H 1/24

US Classification:

42725531, 427533, 427579, 134 11, 134 221, 438905

Abstract:

A method for improving thickness uniformity and throughput of a carbon doped oxide deposition process is described. That method comprises removing pre-deposition steps in a deposition phase. Moreover, helium plasma is added to a pre-clean phase to eliminate the production of dummy wafers.

US Patent:

20040043555, Mar 4, 2004

Filed:

Sep 2, 2003

Appl. No.:

10/654109

Inventors:

Ebrahim Andideh - Portland OR, US
Kevin Peterson - Hillsboro OR, US
Jeffery Bielefeld - Forest Grove OR, US

International Classification:

H01L021/8238

US Classification:

438/232000

Abstract:

Carbon doped oxide (CDO) deposition. One method of deposition includes providing a substrate and introducing oxygen to a carbon doped oxide precursor in the presence of the substrate. A carbon doped oxide film is formed on the substrate. In another method the substrate is placed on a susceptor of a chemical vapor deposition apparatus. A background gas is introduced along with the carbon doped oxide precursor and oxygen to form the carbon doped oxide film on the substrate.

US Patent:

20150276357, Oct 1, 2015

Filed:

Mar 25, 2014

Appl. No.:

14/225256

Inventors:

- Worden MT, US
Kevin G. Peterson - Manhattan Beach CA, US

Assignee:

Matrix Targets LLC - Worden MT

International Classification:

F41J 3/00

Abstract:

A modular archery target comprising a plurality of hexagonal prismatic foam segments and a plurality of rhomboidal prismatic foam segments configured to form an archery target in the shape of a single hexagonal prism. Each of the hexagonal prismatic foam segments and each of the rhomboidal prismatic foam segments is replaceable, interchangeable and reversible, and each of the hexagonal prismatic foam segments is also rotatable. Each of the hexagonal prismatic foam segments and each of the rhomboidal prismatic foam segments is preferably comprised of flexible, self-healing polyurethane foam.