Kyle L Miller

US Patent:

20030124959, Jul 3, 2003

Filed:

Sep 18, 2002

Appl. No.:

10/246280

Inventors:

David Schroeder - Aurora IL, US
Phillip Carter - Naperville IL, US
Jeffrey Chamberlain - Aurora IL, US
Kyle Miller - Oswego IL, US
Isaac Cherian - Aurora IL, US

Assignee:

Cabot Microelectronics Corporation - Aurora IL

International Classification:

B24B001/00

US Classification:

451/041000

Abstract:

The invention provides a method of polishing a substrate comprising a metal layer comprising copper. The method comprises the steps of (i) providing a chemical-mechanical polishing system comprising a liquid carrier, a polishing pad, an abrasive, and a negatively-charged polymer or copolymer, (ii) contacting the substrate with the poloshing system and (iii) abrading at least a portion of the substrate to polish the metal layer of the substrate. The negatively-charged polymer or copolymer comprises one or more monomers selected from sulfonic acids, sulfonates, sulfates, phosphonic acids, phosphonates, and phosphates, has a molecular weight of about 20,000 g/mol or more, and coats at least a portion of the abrasive such that the abrasive has a zeta potential value that is lowered upon interaction of the negatively-charged polymer or copolymer with the abrasive.

US Patent:

20150060579, Mar 5, 2015

Filed:

Aug 18, 2014

Appl. No.:

14/462344

Inventors:

- Minneapolis MN, US
Payton X. Cozart - Uniontown OH, US
Kyle F.M. Miller - Temperance MI, US

International Classification:

B05B 5/04
B05B 5/03

US Classification:

239703

Abstract:

A system including an electrostatic spray system, including a handheld spray coating device, a rotary atomizer coupled to the handheld spray coating device, wherein the rotary atomizer atomizes a liquid flowing through the handheld spray coating device, and an indirect charging device coupled to the handheld spray coating device, wherein the indirect charging device is configured to electrostatically charge the liquid exiting the rotary atomizer.

US Patent:

20140353410, Dec 4, 2014

Filed:

May 1, 2014

Appl. No.:

14/267681

Inventors:

- Minneapolis MN, US
Payton Xavier Cozart - Uniontown OH, US
Kyle F.M. Miller - Temperance MI, US

Assignee:

Finishing Brands Holdings Inc. - Minneapolis MN

International Classification:

B05B 5/053

US Classification:

239690

Abstract:

A system including an electrostatic spray fixture system, including a non-conductive frame surrounding an aperture, wherein the non-conductive frame is configured to retain an object within the aperture, and a conductor coupled to the frame, wherein the conductor is configured to electrically couple to the object within the aperture, and the non-conductive frame comprises a non-conductive material to reduce electrostatic attraction of an electrically charged coating material.